Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 3 · NO. 1 | January 2004
CONTENTS
Editorial
Special Section on Immersion Lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1636769
TOPICS: Stray light, Photomasks, Spatial frequencies, Reflection, Solid state lighting, Polarization, Reflectivity, Imaging systems, Projection systems, Optical simulations
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1637591
TOPICS: Diffraction, Semiconducting wafers, Refractive index, Curium, Photomasks, Interfaces, Critical dimension metrology, Immersion lithography, Image compression, Multilayers
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1632500
TOPICS: Semiconducting wafers, Liquids, Microfluidics, Immersion lithography, Capillaries, Computational fluid dynamics, Fluid dynamics, Computer simulations, Calcium, Refraction
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631007
TOPICS: Polarization, Spatial frequencies, Lithographic illumination, Lithography, Photomasks, Interferometry, Image filtering, Printing, Optical proximity correction, Immersion lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1637594
TOPICS: Water, Polarization, Optical lithography, Refractive index, Interferometry, Immersion lithography, Lithography, Photoresist materials, Microfluidics, Absorption
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1637365
TOPICS: Liquids, Photoresist materials, Binary data, Immersion lithography, Refraction, Thin films, Printing, Phase shifts, Optical lithography, Projection systems
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1630602
TOPICS: Scattering, Water, Refractive index, Mie scattering, Rayleigh scattering, Image acquisition, Spherical lenses, Immersion lithography, Statistical analysis, Photons
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1632501
TOPICS: Water, Prisms, Refractive index, Thermal optics, Interferometry, Ultraviolet radiation, Refraction, Silica, Fabry–Perot interferometers, Immersion lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1637366
TOPICS: Absorption, Immersion lithography, Liquids, Absorbance, Vacuum ultraviolet, Microfluidics, Water, Carbon monoxide, Oxygen, Chemical analysis
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1636490
TOPICS: Pulsed laser operation, Immersion lithography, Semiconducting wafers, Wave propagation, Wavefronts, Refraction, Mechanical engineering, Heat flux, Interfaces, Photoresist materials
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1637592
TOPICS: Lenses, Refractor telescopes, Lithography, Deep ultraviolet, Objectives, Lens design, Ultraviolet radiation, Microscopes, Semiconducting wafers, Wavefronts
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1637593
TOPICS: Immersion lithography, Semiconducting wafers, Water, Liquids, Photomasks, Lithography, Polarization, Projection systems, Binary data, Temperature metrology
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1636768
TOPICS: Photoresist materials, Semiconducting wafers, Water, Liquids, Polarization, Immersion lithography, Lithography, Fluid dynamics, Microfluidics, Refractive index
Lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631314
TOPICS: Birefringence, Crystals, Deep ultraviolet, Calcium, Lithography, Laser crystals, Light wave propagation, Beam propagation method, Visible radiation, Optical lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1630313
TOPICS: Pellicles, Resistance, Oxygen, Nitrogen, Protactinium, Reticles, Finite element methods, Fluid dynamics, Optical lithography, Lithography
EUV Lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631445
TOPICS: Plasma, Magnetism, Lawrencium, Ionization, Absorption, Data modeling, Chemical species, Integrated modeling, Xenon, Extreme ultraviolet lithography
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631006
TOPICS: Multilayers, Coating, Extreme ultraviolet lithography, Silicon, Ions, Reflectivity, Optical spheres, Etching, Particles, Gold
Microelectromechanical Systems
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631924
TOPICS: Semiconducting wafers, Nickel, Computer simulations, Microelectromechanical systems, Dielectrics, Plating, Numerical analysis, Copper, Metals, Silicon
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631923
TOPICS: Diffusers, Polymers, Microfluidics, Actuators, Silicon, Fabrication, Computational fluid dynamics, Microelectromechanical systems, Neck, Numerical simulations
Reactive Development Patterning
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1633273
TOPICS: Polymers, Photoresist materials, Photoresist developing, Optical lithography, Carbonates, Ultrasonics, Near ultraviolet, Dielectrics, Resistance, Industrial chemicals
Photonic Crystal Devices
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631005
TOPICS: Crystals, Photonic crystals, Particles, Reflection, Reflectivity, FT-IR spectroscopy, Scanning electron microscopy, Coating, Infrared spectroscopy, Molecular self-assembly
Materials Transfer Printing
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1630805
TOPICS: Polymers, Adhesives, Lithography, Liquids, Printing, Solids, Semiconducting wafers, Optical alignment, Polymer thin films, Silicon
Scanning Electron Microscopes
J. Micro/Nanolith. MEMS MOEMS 3(1), (1 January 2004) https://doi.org/10.1117/1.1631444
TOPICS: Microscopes, Error analysis, Vibration isolation, Scanning electron microscopy, Video, Electron microscopes, Mathematical modeling, Sensors, Calibration, Computer simulations
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