Development of a MEMS electromagnetic optical scanner for a commercial laser scanning microscope

Hiroshi Miyajima

doi:10.1117/1.1666879

1 April 2004 Development of a MEMS electromagnetic optical scanner for a commercial laser scanning microscope

Hiroshi Miyajima

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 2, (April 2004). https://doi.org/10.1117/1.1666879

Abstract

A microelectromechanical system electromagnetic optical scanner for horizontal scanning in a commercial laser scanning microscope has been developed. Major specifications include mirror size: 4.5×3.3 mm², resonant frequency: 4 kHz, changeable scan angle: 2.1-16°, mirror flatness: <244 nm, and scan angle stability: <0.1%. Initial development started with prototyping a scanner with polyimide hinge, but the stiffness and the Q-factor of polyimide hinge were found insufficient to realize the required resonant frequency and scan angle. On the other hand, a scanner with single crystal silicon hinge has been successfully developed. The electromagnetic scanner has an electroplated copper driving coil to reduce power consumption. A scanner controller using the output signal from an integrated sensing coil was also developed, and sufficient scan angle stability was obtained. The scanner has survived the life test of over 140 billion cycles. It has successfully satisfied all the specifications including not only the fundamentals such as resonant frequency and maximum scan angle but also the ones for commercial products such as scanning stability and durability. It has been commercialized as a part of our product OLS1100 (later remodeled as OLS1200).

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Hiroshi Miyajima "Development of a MEMS electromagnetic optical scanner for a commercial laser scanning microscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(2), (1 April 2004). https://doi.org/10.1117/1.1666879

Published: 1 April 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available