Microelectromechanical system switching isolation amplifier for low frequency measurement

Miao Lu; Zhengping Zhao; Xiaodong Hu; Xuefeng Zou; Hejun Guo

doi:10.1117/1.1758950

1 July 2004 Microelectromechanical system switching isolation amplifier for low frequency measurement

Miao Lu, Zhengping Zhao, Xiaodong Hu, Xuefeng Zou, Hejun Guo

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 3, (July 2004). https://doi.org/10.1117/1.1758950

Abstract

A microelectromechanical systems (MEMS) isolation amplifier is presented, which uses MEMS switches to realize a "flying capacitor" structure. This isolation amplifier has the advantages of simple circuit structures, smaller dimensions, low cost, excellent electromagnetic compatibility (EMC) performance, easy to make multichannel isolation circuits, integration compatibility with on-chip electronics, etc. The performance of the MEMS switch exhibits 30-V pull-in voltage, 35-μs time delay, and 110-V breakdown voltage. The preliminary performance of the isolation amplifier is also demonstrated. To our knowledge, this work presents the first MEMS isolation amplifier structure.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Miao Lu, Zhengping Zhao, Xiaodong Hu, Xuefeng Zou, and Hejun Guo "Microelectromechanical system switching isolation amplifier for low frequency measurement," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(3), (1 July 2004). https://doi.org/10.1117/1.1758950

Published: 1 July 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available