Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 4 · NO. 3 | July 2005
CONTENTS
Editorial
Special Section on Polarization and Hyper-NA Lithography
J. Micro/Nanolith. MEMS MOEMS 4(3), 031102 (1 July 2005) https://doi.org/10.1117/1.2038487
TOPICS: Polarization, Polarimetry, Photomasks, Calibration, Reticles, Phase shifts, Point spread functions, Printing, Immersion lithography, Lithographic illumination
J. Micro/Nanolith. MEMS MOEMS 4(3), 031103 (1 July 2005) https://doi.org/10.1117/1.2039953
TOPICS: Refractive index, Water, Oscillators, Absorption, Absorbance, Lithography, Immersion lithography, Microfluidics, Microfluidic imaging, Glasses
J. Micro/Nanolith. MEMS MOEMS 4(3), 031104 (1 July 2005) https://doi.org/10.1117/1.2039081
TOPICS: Polarization, Reticles, Birefringence, Photoresist materials, Chromium, Photomasks, Lithography, Sodium, Fiber optic illuminators, Imaging systems
J. Micro/Nanolith. MEMS MOEMS 4(3), 031105 (1 July 2005) https://doi.org/10.1117/1.2032888
TOPICS: Polarization, Diodes, Charge-coupled devices, Imaging systems, Photodiodes, Imaging arrays, Photomicroscopy, Silicon, Computer aided design, Silica
J. Micro/Nanolith. MEMS MOEMS 4(3), 031106 (1 July 2005) https://doi.org/10.1117/1.2038687
TOPICS: Polarization, Immersion lithography, Optical proximity correction, Diffraction, Photomasks, Water, Lithographic illumination, Model-based design, Nanoimprint lithography, Lithography
J. Micro/Nanolith. MEMS MOEMS 4(3), 031107 (1 July 2005) https://doi.org/10.1117/1.2037507
TOPICS: Polarization, Polarizers, Refractive index, Binary data, Photomasks, Metals, Chromium, Dielectric polarization, Silicon, Sodium
J. Micro/Nanolith. MEMS MOEMS 4(3), 031108 (1 July 2005) https://doi.org/10.1117/1.2049187
TOPICS: Polarization, Diffraction, Wavefronts, Imaging systems, Zernike polynomials, Superposition, Jones vectors, Radio propagation, Birefringence, Lithography
Articles
J. Micro/Nanolith. MEMS MOEMS 4(3), 033001 (1 July 2005) https://doi.org/10.1117/1.2037407
TOPICS: Diffusion, Polymers, Chemically amplified resists, Capacitance, Semiconducting wafers, Resistance, Dielectrics, Chemical analysis, Mathematical modeling, Capacitors
J. Micro/Nanolith. MEMS MOEMS 4(3), 033002 (1 July 2005) https://doi.org/10.1117/1.2037447
TOPICS: Monte Carlo methods, Line scan image sensors, Spatial resolution, Scanning electron microscopy, Microscopy, Device simulation, Manufacturing, Precision measurement, Computer simulations, Electron microscopes
J. Micro/Nanolith. MEMS MOEMS 4(3), 033003 (1 July 2005) https://doi.org/10.1117/1.2037487
TOPICS: Critical dimension metrology, Scanning electron microscopy, Deep ultraviolet, Microscopes, Photomasks, Cadmium, Opacity, Semiconducting wafers, Electron microscopes, Atomic force microscopy
J. Micro/Nanolith. MEMS MOEMS 4(3), 033004 (1 July 2005) https://doi.org/10.1117/1.2037427
TOPICS: Liquids, Nitrogen, Diffusion, Immersion lithography, Interfaces, Solids, Spherical lenses, Semiconducting wafers, Protactinium, Molecules
J. Micro/Nanolith. MEMS MOEMS 4(3), 033005 (1 July 2005) https://doi.org/10.1117/1.2008969
TOPICS: Optical proximity correction, Photomasks, Lithography, Image filtering, Binary data, Resolution enhancement technologies, Optimization (mathematics), Spatial frequencies, Nonlinear filtering, Interferometry
J. Micro/Nanolith. MEMS MOEMS 4(3), 033006 (1 July 2005) https://doi.org/10.1117/1.2008229
TOPICS: Reticles, Overlay metrology, Image segmentation, Diffraction, Scanning electron microscopy, Scanners, Semiconducting wafers, Monochromatic aberrations, Metrology, Error analysis
J. Micro/Nanolith. MEMS MOEMS 4(3), 033007 (1 July 2005) https://doi.org/10.1117/1.2037467
TOPICS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Solids, Pulsed laser operation, X-rays, Signal attenuation, Photons, Absorption
J. Micro/Nanolith. MEMS MOEMS 4(3), 033008 (1 July 2005) https://doi.org/10.1117/1.2040448
TOPICS: Microactuators, Actuators, Silicon, Convection, Fabrication, Doping, 3D modeling, Low pressure chemical vapor deposition, Micromachining
J. Micro/Nanolith. MEMS MOEMS 4(3), 033009 (1 July 2005) https://doi.org/10.1117/1.2037070
TOPICS: Finite element methods, Structural design, Capacitors, Data modeling, Molecular bridges, Electrodes, Magnesium, Signal detection, Aluminum
J. Micro/Nanolith. MEMS MOEMS 4(3), 033010 (1 July 2005) https://doi.org/10.1117/1.2037387
TOPICS: Resonators, Acoustics, Electrodes, Etching, Aluminum nitride, Electromechanical design, Thin films, Wet etching, Silicon, Inductive coupling
J. Micro/Nanolith. MEMS MOEMS 4(3), 033011 (1 July 2005) https://doi.org/10.1117/1.2008968
TOPICS: Transistors, Epoxies, Resistance, Gallium arsenide, Gold, Silicon, Reliability, Packaging, Field effect transistors, Electronics
J. Micro/Nanolith. MEMS MOEMS 4(3), 033012 (1 July 2005) https://doi.org/10.1117/1.2036991
TOPICS: Thin films, Silicon, Fabrication, Thin film deposition, Electron beam lithography, Crystals, Nanostructures, Silicon films, Nanolithography, Thin film growth
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