MOEMS tunable optical filter based on photonic crystals

Huibing Mao; Weiping Jing

doi:10.1117/1.2109792

1 October 2005 MOEMS tunable optical filter based on photonic crystals

Huibing Mao, Weiping Jing

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 041301 (October 2005). https://doi.org/10.1117/1.2109792

Abstract

1-D photonic crystals with defects such as (L₁H₁)^mL_CH₂(L₂H₂)ⁿ are investigated. The bandgap edge transmission peak is narrowed when the couple layer L_C and the cover layer H₂(L₂H₂)ⁿ are added to the photonic crystal (L₁H₁)^m. Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (>150 nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Huibing Mao and Weiping Jing "MOEMS tunable optical filter based on photonic crystals," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041301 (1 October 2005). https://doi.org/10.1117/1.2109792

Published: 1 October 2005

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