Closed-loop adaptive control for electrostatically driven torsional micromirrors

Ke-Min Liao; Yi-Chih Wang; Chih-Hsien Yeh; Rongshun Chen

doi:10.1117/1.2110145

1 October 2005 Closed-loop adaptive control for electrostatically driven torsional micromirrors

Ke-Min Liao, Yi-Chih Wang, Chih-Hsien Yeh, Rongshun Chen

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 041503 (October 2005). https://doi.org/10.1117/1.2110145

Abstract

We demonstrate a closed-loop adaptive control scheme for achieving accurate positioning and trajectory tracking of an electrostatically driven torsional micromirror. Compared to the conventional proportional-integral-derivative (PID) controller, the proposed adaptive self-tuning controller has advantages of on-line compensating parameter variations and model uncertainty of the torsional micromirror, resulting from fabrication imperfections. Numerical simulation results utilizing MATLAB indicate that the proposed adaptive controller has a better transient response and can more precisely follow the reference trajectory, compared to the PID control scheme. The torsional micromirror is designed and successfully fabricated using surface micromachining processes. Real-time experimental results demonstrate that the proposed adaptive control is feasible and can improve the performance of the micromirror.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ke-Min Liao, Yi-Chih Wang, Chih-Hsien Yeh, and Rongshun Chen "Closed-loop adaptive control for electrostatically driven torsional micromirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041503 (1 October 2005). https://doi.org/10.1117/1.2110145

Published: 1 October 2005

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