Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 5 · NO. 1 | January 2006
CONTENTS
IN THIS ISSUE

Editorial (1)
Articles (8)
Editorial
Special Section on Nanopatterning
J. Micro/Nanolith. MEMS MOEMS 5(1), 011002 (1 January 2006) https://doi.org/10.1117/1.2172991
TOPICS: Nanoimprint lithography, Silicon, Gallium arsenide, Polymethylmethacrylate, Lithography, Etching, Electron beam lithography, Scanning electron microscopy, Distortion, Dry etching
J. Micro/Nanolith. MEMS MOEMS 5(1), 011003 (1 January 2006) https://doi.org/10.1117/1.2172992
TOPICS: Ultrasonics, Polymers, Nanoimprint lithography, Polymer thin films, Transducers, Lithography, Nanostructures, Silicon, Atomic force microscopy, Energy efficiency
J. Micro/Nanolith. MEMS MOEMS 5(1), 011004 (1 January 2006) https://doi.org/10.1117/1.2177286
TOPICS: Polymers, Polymethylmethacrylate, Nanoimprint lithography, Finite element methods, Numerical analysis, Glasses, Polymer thin films, Lithography, Process modeling, Thin films
J. Micro/Nanolith. MEMS MOEMS 5(1), 011005 (1 January 2006) https://doi.org/10.1117/1.2176729
TOPICS: Polymers, Optimization (mathematics), Temperature metrology, Polymethylmethacrylate, Interfaces, Manufacturing, Glasses, Nanolithography, Nanostructures, Materials processing
J. Micro/Nanolith. MEMS MOEMS 5(1), 011006 (1 January 2006) https://doi.org/10.1117/1.2172614
TOPICS: Etching, Electrodes, Nanolithography, Gold, Thin films, Resistance, Scanning electron microscopy, Molecules, Ion beams, Nanowires
J. Micro/Nanolith. MEMS MOEMS 5(1), 011007 (1 January 2006) https://doi.org/10.1117/1.2176730
TOPICS: Polymethylmethacrylate, X-ray lithography, Polymers, Liquids, Photomasks, Solids, Electroplating, Silicon, Nanofabrication, Microelectromechanical systems
J. Micro/Nanolith. MEMS MOEMS 5(1), 011008 (1 January 2006) https://doi.org/10.1117/1.2177287
TOPICS: Indium arsenide, Quantum dots, Gallium arsenide, Annealing, Atomic force microscopy, Semiconductors, Molecular beam epitaxy, Molecules, Crystals, Molecular self-assembly
J. Micro/Nanolith. MEMS MOEMS 5(1), 011009 (1 January 2006) https://doi.org/10.1117/1.2177288
TOPICS: Silicon carbide, Optical spheres, Nanostructures, Silica, Scanning electron microscopy, Laser ablation, Near field optics, Lithography, Etching, Femtosecond phenomena
J. Micro/Nanolith. MEMS MOEMS 5(1), 011010 (1 January 2006) https://doi.org/10.1117/1.2172993
TOPICS: Polymers, Nanoimprint lithography, Nanolithography, Etching, Photomicroscopy, Microfluidics, Silicon, Scanning electron microscopy, Nanotechnology, Applied sciences
J. Micro/Nanolith. MEMS MOEMS 5(1), 011011 (1 January 2006) https://doi.org/10.1117/1.2181581
TOPICS: Ions, Optical lithography, Ion beams, Magnetism, Silicon carbide, Gallium, Nanofabrication, Silicon, Nanostructures, Platinum
J. Micro/Nanolith. MEMS MOEMS 5(1), 011012 (1 January 2006) https://doi.org/10.1117/1.2173269
TOPICS: Lithography, Silicon, Chromium, Nanostructures, Scanning electron microscopy, Mirrors, Photomasks, Photomicroscopy, Etching, Photoresist materials
J. Micro/Nanolith. MEMS MOEMS 5(1), 011013 (1 January 2006) https://doi.org/10.1117/1.2172994
TOPICS: Near field optics, Fullerenes, Composites, Near field scanning optical microscopy, Optical storage, Near field, Integrated optics, Polymers, Optical computing, Optical signal processing
J. Micro/Nanolith. MEMS MOEMS 5(1), 011014 (1 January 2006) https://doi.org/10.1117/1.2183318
TOPICS: Patents, Nanotechnology, Microsystems, Nanostructures, Nanolithography, Microfabrication, Semiconductors, Electrodes, Manufacturing, Microelectromechanical systems
Articles
J. Micro/Nanolith. MEMS MOEMS 5(1), 013001 (1 January 2006) https://doi.org/10.1117/1.2170550
TOPICS: Nanoimprint lithography, Data modeling, Polymers, Polymethylmethacrylate, X-rays, Scattering, Scanning electron microscopy, Diffraction, Picosecond phenomena, Silicon
J. Micro/Nanolith. MEMS MOEMS 5(1), 013002 (1 January 2006) https://doi.org/10.1117/1.2170110
TOPICS: Electron beam lithography, X-ray lithography, Photomasks, Gold, Nickel, X-rays, Scanning electron microscopy, Lithography, Silicon, Zone plates
J. Micro/Nanolith. MEMS MOEMS 5(1), 013003 (1 January 2006) https://doi.org/10.1117/1.2167968
TOPICS: Sensors, Actuators, Resistors, Resistance, Electrodes, Capacitors, Capacitance, Systems modeling, Environmental sensing, Electronic filtering
J. Micro/Nanolith. MEMS MOEMS 5(1), 013004 (1 January 2006) https://doi.org/10.1117/1.2170098
TOPICS: Diffraction gratings, Diffraction, Polymers, Silicon, Ultraviolet radiation, Nickel, Atomic force microscopy, Diffractive optical elements, Polymethylmethacrylate, Modulation
J. Micro/Nanolith. MEMS MOEMS 5(1), 013005 (1 January 2006) https://doi.org/10.1117/1.2168449
TOPICS: Diffusion, Optical lithography, Mathematical modeling, Monochromatic aberrations, Point spread functions, Image processing, Convolution, Stochastic processes, Photoresist processing, Solids
J. Micro/Nanolith. MEMS MOEMS 5(1), 013006 (1 January 2006) https://doi.org/10.1117/1.2168461
TOPICS: Optical alignment, Semiconducting wafers, Chemical mechanical planarization, Signal detection, Signal processing, Lithography, Photomasks, Polishing, Laser marking, Metrology
J. Micro/Nanolith. MEMS MOEMS 5(1), 013007 (1 January 2006) https://doi.org/10.1117/1.2167947
TOPICS: Contamination, Semiconducting wafers, Immersion lithography, Diffusion, Microfluidics, Absorption, Liquids, Water, Transmittance, Photoresist processing
J. Micro/Nanolith. MEMS MOEMS 5(1), 013008 (1 January 2006) https://doi.org/10.1117/1.2158818
TOPICS: Semiconducting wafers, Immersion lithography, Liquids, Quartz, Image processing, Microfluidics, Cameras, Glasses, Fluid dynamics, Calcium
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