Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips

Alison Gracias; Xiaojun Feng; Bai Xu; James Castracane

doi:10.1117/1.2200674

1 April 2006 Novel microfabrication approach of embedded SU8^TM fluidic networks for cell transport on chips

Alison Gracias, Xiaojun Feng, Bai Xu, James Castracane

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 2, 021102 (April 2006). https://doi.org/10.1117/1.2200674

Abstract

We focus on the development and fabrication of SU8^TM-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8^TM channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Alison Gracias, Xiaojun Feng, Bai Xu, and James Castracane "Novel microfabrication approach of embedded SU8^TM fluidic networks for cell transport on chips," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(2), 021102 (1 April 2006). https://doi.org/10.1117/1.2200674

Published: 1 April 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available