Laser interference as a lithographic nanopatterning tool

Cees J. M. van Rijn

doi:10.1117/1.2173269

1 January 2006 Laser interference as a lithographic nanopatterning tool

Cees J. M. van Rijn

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 1, 011012 (January 2006). https://doi.org/10.1117/1.2173269

Abstract

Laser interference lithography is reviewed as an adequate nanopatterning tool for devices with periodic structures. The structure size may practically be chosen in the range between 100 nm and 10.0 µm by adjusting the angle of incidence θ of the incoming laser beam. The exposure method is fast, inexpensive, and applicable for large areas. The method may be used to fabricate microsieves, shadow masks, calibration grids, and photonic crystals.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Cees J. M. van Rijn "Laser interference as a lithographic nanopatterning tool," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 011012 (1 January 2006). https://doi.org/10.1117/1.2173269

Published: 1 January 2006

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