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1 April 2006 Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror
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There is a great need for techniques that will permit the evaluation of the micromechanical state of micro-electro-mechanical system (MEMS) devices, at all steps of manufacturing, with respect to material properties, as well as of lifetime and for monitoring mechanical performances of MEMS actuators. We propose a new approach, based on integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated on the top of an electrostatically rotatable micromirror loaded with the sensing arm of MZI. The working principle of MZI read-out is based on the local change of the effective refractive index of guided waves of MZI, induced by strains of the deformable structure. A single-mode buried channel waveguide based on the silica/silicon oxinitride/silica structure is used, presenting optical attenuation of 0.6 dB/cm. The coupling of the standard optical fiber to the waveguide is based on the V-groove technique, supplemented by micromechanical sawing of the silicon substrate. For TE polarization, the set of obtained parameters is a coupling efficiency of about 55% with a horizontal misalignment of ±0.5 µm, a vertical misalignment of ±0.7 µm, and angular precision of ±0.2 deg on <110> directions of the silicon substrate.
Lukasz Nieradko, Christophe Gorecki, Michal Józwik, Andrei Sabac, Rolf Hoffmann, and Andreas Bertz "Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(2), 023009 (1 April 2006).
Published: 1 April 2006

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