Microchannels with rectangular and arched core shapes fabricated using sacrificial etching

Jeffrey R. Lee; John Paul Barber; Zachary A. George; Milton L. Lee; Holger Schmidt; Aaron R. Hawkins

doi:10.1117/1.2434990

1 January 2007 Microchannels with rectangular and arched core shapes fabricated using sacrificial etching

Jeffrey R. Lee, John Paul Barber, Zachary A. George, Milton L. Lee, Holger Schmidt, Aaron R. Hawkins

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 1, 013010 (January 2007). https://doi.org/10.1117/1.2434990

Abstract

A study of relevant fabrication parameters is presented for a process that uses chemical etching of sacrificial cores to produce long, hollow microchannels. Two different sacrificial materials are investigated, SU8 and reflowed photoresist. These two materials produce channel cross sections with rectangular and arch-shaped cores, respectively. Fabrication times based on etch removal rates of sacrificial materials are reported for SU8 core microchannels and for a hybrid core consisting of reflowed photoresist and aluminum layers. The hybrid design takes advantage of the fast etch times possible for aluminum, but also produces smooth, arched sidewalls. Structural integrity is also investigated for different microchannels, specifically the wall thickness required to produce an intact channel of a given width. Empirical design rules indicate that SU8-based core channels require a wall thickness-to-width ratio of greater than 1:10, and reflowed photoresist based structures require a ratio greater than 1:50.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jeffrey R. Lee, John Paul Barber, Zachary A. George, Milton L. Lee, Holger Schmidt, and Aaron R. Hawkins "Microchannels with rectangular and arched core shapes fabricated using sacrificial etching," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(1), 013010 (1 January 2007). https://doi.org/10.1117/1.2434990

Published: 1 January 2007

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available