journal of micro nanolithography mems and moems
VOL. 7 · NO. 2 | April 2008
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 7(2), 020101 (1 April 2008) doi:10.1117/1.2951889
JM3 Letters
J. Micro/Nanolith. MEMS MOEMS 7(2), 020501 (1 April 2008) doi:10.1117/1.2938993
TOPICS: Photomasks, Lithography, Semiconducting wafers, Diffraction, Resonance enhancement, Tantalum, Dielectrics, Critical dimension metrology, Electromagnetism, Radio propagation
Special Section on Silicon-Based MOEMS and Their Applications
J. Micro/Nanolith. MEMS MOEMS 7(2), 020901 (1 April 2008) doi:10.1117/1.2913329
Michael Scholles, Andreas Bräuer, Klaus Frommhagen, Christian Gerwig, Hubert Lakner, Harald Schenk, Markus Schwarzenberg
J. Micro/Nanolith. MEMS MOEMS 7(2), 021001 (1 April 2008) doi:10.1117/1.2911643
TOPICS: Mirrors, Projection systems, Modulation, Video, Laser sources, Semiconductor lasers, LCDs, Image resolution, Microopto electromechanical systems, RGB color model
J. Micro/Nanolith. MEMS MOEMS 7(2), 021002 (1 April 2008) doi:10.1117/1.2908951
TOPICS: Mirrors, Motion models, Microelectromechanical systems, Actuators, Micromirrors, Oscillators, Data modeling, Stochastic processes, Motion measurement, Motion estimation
Chengkuo Lee, Jer-Liang Yeh
J. Micro/Nanolith. MEMS MOEMS 7(2), 021003 (1 April 2008) doi:10.1117/1.2949816
TOPICS: Signal attenuation, Microelectromechanical systems, Mirrors, Actuators, Camera shutters, Microopto electromechanical systems, Reflectivity, Silicon, Micromirrors, Optical alignment
J. Micro/Nanolith. MEMS MOEMS 7(2), 021004 (1 April 2008) doi:10.1117/1.2909206
TOPICS: Reflectors, Tunable filters, Optical filters, Electronic filtering, Infrared detectors, Refractive index, Sensors, Silicon, Reflectivity, Transmittance
J. Micro/Nanolith. MEMS MOEMS 7(2), 021005 (1 April 2008) doi:10.1117/1.2911035
TOPICS: Spectroscopy, Silicon, Etching, Near infrared, Diffraction gratings, Diodes, Semiconducting wafers, Signal processing, Mirrors, Monochromators
J. Micro/Nanolith. MEMS MOEMS 7(2), 021006 (1 April 2008) doi:10.1117/1.2945227
TOPICS: Mirrors, FT-IR spectroscopy, Microopto electromechanical systems, Protactinium, Spectrometers, Actuators, Infrared radiation, Microelectromechanical systems, Spectral resolution, Signal to noise ratio
Ali Khiat, F. Lamarque, C. Prelle, A. Phataralaoha, Jan Dittmer, T. Krah, Monika Leester-Schaedel, Stephanus Büttgenbach
J. Micro/Nanolith. MEMS MOEMS 7(2), 021007 (1 April 2008) doi:10.1117/1.2909459
TOPICS: Silicon, Sensors, Microfabrication, Aluminum, Etching, Gold, Fiber optics, Diffraction gratings, Fiber optics sensors, Micromachining
J. Micro/Nanolith. MEMS MOEMS 7(2), 021008 (1 April 2008) doi:10.1117/1.2911024
TOPICS: Mirrors, Monochromatic aberrations, Optical coherence tomography, Confocal microscopy, Imaging systems, Tissues, Objectives, Optical components, Microelectromechanical systems, Microscopes
J. Micro/Nanolith. MEMS MOEMS 7(2), 021009 (1 April 2008) doi:10.1117/1.2909451
TOPICS: Deformable mirrors, Actuators, Mirrors, Microelectromechanical systems, Image quality, Optical microscopes, Cameras, Calibration, Scanners, Optical design
Ho-Chiao Chuang, Ricardo Jimenez-Martinez, Simon Braun, Dana Anderson, Victor Bright
J. Micro/Nanolith. MEMS MOEMS 7(2), 021010 (1 April 2008) doi:10.1117/1.2911630
TOPICS: Semiconductor lasers, Silicon, Ferroelectric materials, Rubidium, Actuators, Temperature metrology, Doppler effect, Copper, Laser systems engineering, Laser development
J. Micro/Nanolith. MEMS MOEMS 7(2), 021011 (1 April 2008) doi:10.1117/1.2911021
TOPICS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Deep ultraviolet, Oxides, Actuators, Analog electronics, Titanium, Silicon
Jan-Uwe Schmidt, Martin Friedrichs, Andreas Gehner
J. Micro/Nanolith. MEMS MOEMS 7(2), 021012 (1 April 2008) doi:10.1117/1.2945230
TOPICS: Actuators, Mirrors, Aluminum, Reflectivity, Micromirrors, CMOS technology, Analog electronics, Deep ultraviolet, Multilayers, Etching
J. Micro/Nanolith. MEMS MOEMS 7(2), 021013 (1 April 2008) doi:10.1117/1.2909279
TOPICS: Diffractive optical elements, Silicon, Actuators, Mirrors, Multilayers, Optical components, Scanning electron microscopy, Diffraction, Microopto electromechanical systems, Electrochemical etching
J. Micro/Nanolith. MEMS MOEMS 7(2), 021014 (1 April 2008) doi:10.1117/1.2920338
TOPICS: Mirrors, Micromirrors, Electrodes, Cryogenics, Astronomical imaging, Semiconducting wafers, Spectroscopy, Deep reactive ion etching, Coating, Spectrographs
Articles
Heping Liu, Idriss Blakey, Willard Conley, Graeme George, David Hill, Andrew Whittaker
J. Micro/Nanolith. MEMS MOEMS 7(2), 023001 (1 April 2008) doi:10.1117/1.2908937
TOPICS: Chromium, Etching, Line edge roughness, Double patterning technology, Photomasks, Photoresist processing, Refractive index, Image registration, Lithography, Scanning electron microscopy
David Van Steenwinckel, Roel Gronheid, Jeroen Lammers, Frieda Van Roey, Patrick Willems
J. Micro/Nanolith. MEMS MOEMS 7(2), 023002 (1 April 2008) doi:10.1117/1.2909204
TOPICS: Line width roughness, Nanoimprint lithography, Electroluminescence, Diffusion, Photoresist materials, Absorbance, Extreme ultraviolet, Lithography, Photoresist processing, Extreme ultraviolet lithography
Ian Foulds, Robert Johnstone, See-Ho Tsang, M. Pallapa
J. Micro/Nanolith. MEMS MOEMS 7(2), 023003 (1 April 2008) doi:10.1117/1.2909468
TOPICS: Deep ultraviolet, Data modeling, Semiconducting wafers, Microelectromechanical systems, Absorbance, Absorption, Polymers, Etching, Standards development, Wafer-level optics
Houwen Tang, Yun-Bo Yi, Mohammad Matin
J. Micro/Nanolith. MEMS MOEMS 7(2), 023004 (1 April 2008) doi:10.1117/1.2909274
TOPICS: Mirrors, Microelectromechanical systems, Chemical elements, Thermal modeling, Resonators, Finite element methods, Analytical research, Computer engineering, Micromirrors, Nanoelectromechanical systems
J. Micro/Nanolith. MEMS MOEMS 7(2), 023005 (1 April 2008) doi:10.1117/1.2911639
TOPICS: Refraction, Water, Prisms, Refractive index, Thermal optics, Microfluidics, Lithography, Absorbance, Temperature metrology, Electrodes
Takayuki Abe, Jun Yashima, Hayato Shibata
J. Micro/Nanolith. MEMS MOEMS 7(2), 023006 (1 April 2008) doi:10.1117/1.2909474
TOPICS: Critical dimension metrology, Computed tomography, Forward error correction, Convolution, Modulation, Fourier transforms, Semiconducting wafers, Erbium, Lithography, Numerical analysis
Jongwoong Kim, Young-Chul Lee, Sang-Su Ha, Ja-Myeong Koo, Jae-Hoon Ko, Wansoo Nah, Seung-Boo Jung
J. Micro/Nanolith. MEMS MOEMS 7(2), 023007 (1 April 2008) doi:10.1117/1.2908941
TOPICS: Microwave radiation, Adhesives, Quartz, Semiconducting wafers, Silicon, Particles, Gold, Resistance, Signal attenuation, Epoxies
J. Micro/Nanolith. MEMS MOEMS 7(2), 023008 (1 April 2008) doi:10.1117/1.2896047
TOPICS: Etching, Silicon, Lithography, Capillaries, Ultraviolet radiation, Coating, Liquids, Polymers, Optical lithography, Data modeling
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