High-resolution permanent photoresist laminate for microsystem applications

U. Stohr; P. Vulto; P. Hoppe; Gerald A. Urban; Holger Reinecke

doi:10.1117/1.2964217

1 July 2008 High-resolution permanent photoresist laminate for microsystem applications

U. Stohr, P. Vulto, P. Hoppe, Gerald A. Urban, Holger Reinecke

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 3, 033009 (July 2008). https://doi.org/10.1117/1.2964217

Abstract

A new permanent dry film photoresist, TMMF S2000, is tested and evaluated for microsystem applications. The resist provides high resolution, high aspect ratios, and homogeneous resist thicknesses. Aspect ratios up to 6:1 (height:width) may be achieved for both structures and channels. Buried structures are created by covering channels with a laminated resist layer. In addition, a very fast direct wafer bonding process is developed. In this process, the resist is patterned on a wafer and directly bonded to a second wafer using pressure and heat. Both techniques enable the fabrication of microfluidic chips with high aspect ratio structures.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

U. Stohr, P. Vulto, P. Hoppe, Gerald A. Urban, and Holger Reinecke "High-resolution permanent photoresist laminate for microsystem applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033009 (1 July 2008). https://doi.org/10.1117/1.2964217

Published: 1 July 2008

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE