Extraction of Young's modulus and residual stress of structural materials through measurement of pull-in voltage and off-capacitance of beams

Jaibir Sharma

doi:10.1117/1.2990734

1 October 2008 Extraction of Young's modulus and residual stress of structural materials through measurement of pull-in voltage and off-capacitance of beams

Jaibir Sharma

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 4, 043020 (October 2008). https://doi.org/10.1117/1.2990734

Abstract

The mechanical properties of the structural layer play an important role in the design and optimization of microelectromechanical system structures. The pull-in measurement is a popular technique used to measure the mechanical properties of a material, but its success depends on the accurate measurement of the gap (g) between the beam and the ground plane and its uniformity. We propose a novel technique that does not require accurate knowledge of the value of g. In our proposed method, a large number of beams with different lengths (L) are to be fabricated simultaneously and the off-capacitance (C_off) in addition to pull-in voltage (V_pi) measured in the same setup. To get accurate results, the range of length of beams must be properly chosen. We show, with the help of simulations, that by using our method the material properties can be extracted very accurately even when the gap (g) is nonuniform.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jaibir Sharma "Extraction of Young's modulus and residual stress of structural materials through measurement of pull-in voltage and off-capacitance of beams," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(4), 043020 (1 October 2008). https://doi.org/10.1117/1.2990734

Published: 1 October 2008

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available