Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 8 · NO. 2 | April 2009
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 8(2), 020101 (1 April 2009) https://doi.org/10.1117/1.3160634
TOPICS: Digital libraries, Internet, Multimedia, Video
Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS
J. Micro/Nanolith. MEMS MOEMS 8(2), 021101 (1 April 2009) https://doi.org/10.1117/1.3155403
TOPICS: Microelectromechanical systems, BioMEMS, Transducers, Microopto electromechanical systems, Nanotechnology, Microfluidics, Materials science, Sensors, Actuators, Packaging
J. Micro/Nanolith. MEMS MOEMS 8(2), 021102 (1 April 2009) https://doi.org/10.1117/1.3091940
TOPICS: Microfluidics, Numerical analysis, Polymers, Resistance, Computer simulations, Atmospheric modeling, Microelectromechanical systems, Shape analysis, Glasses, Temperature metrology
J. Micro/Nanolith. MEMS MOEMS 8(2), 021103 (1 April 2009) https://doi.org/10.1117/1.3124191
TOPICS: Microfluidics, Packaging, Glasses, Plasma treatment, Microelectromechanical systems, Switching, Control systems, Photoresist materials, Copper, Semiconducting wafers
J. Micro/Nanolith. MEMS MOEMS 8(2), 021104 (1 April 2009) https://doi.org/10.1117/1.3100201
TOPICS: Electrodes, 3D displays, Dielectrics, Liquids, Silicon, 3D image processing, Glasses, Coating, Minerals, Sun
J. Micro/Nanolith. MEMS MOEMS 8(2), 021105 (1 April 2009) https://doi.org/10.1117/1.3122367
TOPICS: Microfluidics, Chemical reactions, Platinum, Semiconducting wafers, Hydrogen, Liquids, Diffusion, Optical lithography, Wafer bonding, Oxygen
J. Micro/Nanolith. MEMS MOEMS 8(2), 021106 (1 April 2009) https://doi.org/10.1117/1.3142967
TOPICS: Particles, Dielectrophoresis, Electrodes, Numerical simulations, Error analysis, Microfluidics, Dielectrics, Numerical analysis, Optoelectronic devices, Computer simulations
J. Micro/Nanolith. MEMS MOEMS 8(2), 021107 (1 April 2009) https://doi.org/10.1117/1.3152003
TOPICS: Electrodes, Molecules, Microfluidics, Solar concentrators, Particles, Gold, Glasses, Numerical simulations, Microscopes, Luminescence
J. Micro/Nanolith. MEMS MOEMS 8(2), 021110 (1 April 2009) https://doi.org/10.1117/1.3100423
TOPICS: Chlorine, Argon, Etching, Plasma, Ions, Autoregressive models, Vanadium, Plasma etching, Chemical species, Sputter deposition
J. Micro/Nanolith. MEMS MOEMS 8(2), 021111 (1 April 2009) https://doi.org/10.1117/1.3116126
TOPICS: Metals, Nickel, Ions, Electroplating, Diffusion, Polymethylmethacrylate, Gas lasers, Carbon monoxide, Convection, Plating
J. Micro/Nanolith. MEMS MOEMS 8(2), 021112 (1 April 2009) https://doi.org/10.1117/1.3091941
TOPICS: Microelectromechanical systems, Aluminum, Acoustics, Etching, Capacitance, Finite element methods, Silicon, Scanning electron microscopy, Electrodes, Mechanical sensors
J. Micro/Nanolith. MEMS MOEMS 8(2), 021113 (1 April 2009) https://doi.org/10.1117/1.3129824
TOPICS: Ultrasonics, Polymethylmethacrylate, Polymers, Nickel, Scanning electron microscopy, Silicon, Microfabrication, Deep reactive ion etching, Photoresist materials, Oxidation
J. Micro/Nanolith. MEMS MOEMS 8(2), 021114 (1 April 2009) https://doi.org/10.1117/1.3100208
TOPICS: Actuators, Nickel, Metals, Silicon, Finite element methods, Polysomnography, Scanning electron microscopy, Microelectromechanical systems, Temperature metrology, Etching
J. Micro/Nanolith. MEMS MOEMS 8(2), 021115 (1 April 2009) https://doi.org/10.1117/1.3151998
TOPICS: Microorganisms, Copper, Thermoelectric materials, Head, Electrodes, Metals, Photography, Bismuth, Tellurium, Resistance
J. Micro/Nanolith. MEMS MOEMS 8(2), 021116 (1 April 2009) https://doi.org/10.1117/1.3143192
TOPICS: Silicon carbide, Sensors, Microelectromechanical systems, Silicon, Oscillators, Electronics, Etching, Environmental sensing, Resonators, Actuators
J. Micro/Nanolith. MEMS MOEMS 8(2), 021117 (1 April 2009) https://doi.org/10.1117/1.3142970
TOPICS: Silicon, Atomic force microscopy, Crystals, Anisotropic etching, Actuators, Etching, Atomic force microscope, Photomasks, Chromium, Oxidation
J. Micro/Nanolith. MEMS MOEMS 8(2), 021118 (1 April 2009) https://doi.org/10.1117/1.3134087
TOPICS: Microelectromechanical systems, Sensors, Packaging, Electrodes, Quartz, Semiconducting wafers, Capacitance, Gold, Scanning electron microscopy, Integrated circuits
J. Micro/Nanolith. MEMS MOEMS 8(2), 021120 (1 April 2009) https://doi.org/10.1117/1.3124190
TOPICS: Electrodes, Sensors, Skin, Electrocardiography, Signal processing, Transceivers, Electroencephalography, Microcontrollers, Interfaces, Biomedical optics
J. Micro/Nanolith. MEMS MOEMS 8(2), 021121 (1 April 2009) https://doi.org/10.1117/1.3094749
TOPICS: Acoustics, Wireless communications, Resonators, Device simulation, Image filtering, Radio frequency circuits, Circuit switching, Electrodes, Roads, Signal attenuation
J. Micro/Nanolith. MEMS MOEMS 8(2), 021122 (1 April 2009) https://doi.org/10.1117/1.3100204
TOPICS: Switches, Microelectromechanical systems, Gold, Metals, Silicon, Semiconducting wafers, Resistance, Reliability, Multilayers, Ruthenium
J. Micro/Nanolith. MEMS MOEMS 8(2), 021130 (1 April 2009) https://doi.org/10.1117/1.3122366
TOPICS: Gyroscopes, Silicon, Sensors, Roads, Microelectromechanical systems, Information science, Information technology, Sensor technology, Telecommunications
J. Micro/Nanolith. MEMS MOEMS 8(2), 021140 (1 April 2009) https://doi.org/10.1117/1.3094748
TOPICS: Palladium, Transmittance, Surface plasmons, Hydrogen, Signal attenuation, Infrared radiation, Optical properties, Silicon, Interfaces, Sensors
J. Micro/Nanolith. MEMS MOEMS 8(2), 021150 (1 April 2009) https://doi.org/10.1117/1.3094747
TOPICS: Resonance enhancement, Magnetism, Physics, Silicon, Magnetic sensors, Annealing, Magnetostrictive materials, Magnetic semiconductors, Semiconductors, Iron
J. Micro/Nanolith. MEMS MOEMS 8(2), 021151 (1 April 2009) https://doi.org/10.1117/1.3143041
TOPICS: Carbon nanotubes, Chemical species, Picosecond phenomena, Heat flux, Carbon, Thermal modeling, 3D modeling, Phonons, Thermal effects, Roads
J. Micro/Nanolith. MEMS MOEMS 8(2), 021160 (1 April 2009) https://doi.org/10.1117/1.3142971
TOPICS: Magnetism, Aluminum, Microelectromechanical systems, Device simulation, Silicon, Acoustics, Structural design, Finite element methods, Electronics, Roads
J. Micro/Nanolith. MEMS MOEMS 8(2), 021170 (1 April 2009) https://doi.org/10.1117/1.3142966
TOPICS: Nanoimprint lithography, Distortion, Polymers, Organic photovoltaics, Photovoltaics, Lithography, Photoresist processing, Semiconducting wafers, Diamond, Ultraviolet radiation
J. Micro/Nanolith. MEMS MOEMS 8(2), 021180 (1 April 2009) https://doi.org/10.1117/1.3152000
TOPICS: Radioisotopes, Doping, Semiconductors, Metals, Resistance, Diffusion, Microelectromechanical systems, Chemical species, Prototyping, Calibration
J. Micro/Nanolith. MEMS MOEMS 8(2), 021190 (1 April 2009) https://doi.org/10.1117/1.3152235
TOPICS: Electromechanical design, Electrodes, Finite element methods, Capacitance, Optimization (mathematics), Transducers, Ultrasonics, Silicon, Etching, 3D modeling
Special Section on Extreme-Ultraviolet Interference Lithography
J. Micro/Nanolith. MEMS MOEMS 8(2), 021201 (1 April 2009) https://doi.org/10.1117/1.3156651
TOPICS: Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Photoresist developing, Photoresist materials, Interferometry, Imaging systems, Fringe analysis, Optical lithography, Synchrotrons
J. Micro/Nanolith. MEMS MOEMS 8(2), 021202 (1 April 2009) https://doi.org/10.1117/1.3112008
TOPICS: Interferometers, Extreme ultraviolet, Wavefronts, Spherical lenses, Optical design, Visibility, Lithography, Extreme ultraviolet lithography, Synchrotrons, Diffraction gratings
J. Micro/Nanolith. MEMS MOEMS 8(2), 021203 (1 April 2009) https://doi.org/10.1117/1.3112006
TOPICS: Modulation, Diffraction gratings, Photomasks, Diffraction, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Interferometry, Fringe analysis, Interferometers
J. Micro/Nanolith. MEMS MOEMS 8(2), 021204 (1 April 2009) https://doi.org/10.1117/1.3116559
TOPICS: Magnetism, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Polymers, Photomasks, Gold, Proteins, Nanolithography, Nanowires
J. Micro/Nanolith. MEMS MOEMS 8(2), 021205 (1 April 2009) https://doi.org/10.1117/1.3124188
TOPICS: Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Lithography, Photomasks, Contamination, Photoresist materials, Semiconducting wafers, Printing, Optical lithography
J. Micro/Nanolith. MEMS MOEMS 8(2), 021206 (1 April 2009) https://doi.org/10.1117/1.3129837
TOPICS: Extreme ultraviolet, Interferometry, Lithography, Interferometers, Mirrors, Diffraction gratings, Wavefronts, Extreme ultraviolet lithography, Capillaries, Synchrotrons
J. Micro/Nanolith. MEMS MOEMS 8(2), 021207 (1 April 2009) https://doi.org/10.1117/1.3134094
TOPICS: Photomasks, Extreme ultraviolet, Interferometry, Plasma, Lithography, Mirrors, Imaging systems, Holography, Reflectivity, Interferometers
Articles
J. Micro/Nanolith. MEMS MOEMS 8(2), 023001 (1 April 2009) https://doi.org/10.1117/1.3116127
TOPICS: Chromium, Etching, Line edge roughness, Double patterning technology, Photomasks, Photoresist processing, Image registration, Lithography, Scanning electron microscopy, Inspection
J. Micro/Nanolith. MEMS MOEMS 8(2), 023005 (1 April 2009) https://doi.org/10.1117/1.3124189
TOPICS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography
J. Micro/Nanolith. MEMS MOEMS 8(2), 023008 (1 April 2009) https://doi.org/10.1117/1.3155515
TOPICS: Lithography, Critical dimension metrology, Double patterning technology, SRAF, Scanners, Image processing, Photomasks, Optical proximity correction, Resolution enhancement technologies, Semiconducting wafers
J. Micro/Nanolith. MEMS MOEMS 8(2), 023010 (1 April 2009) https://doi.org/10.1117/1.3129830
TOPICS: Resonators, Microfluidics, Silicon, Chemical elements, Microelectromechanical systems, Finite element methods, Fluid dynamics, Nanoelectromechanical systems, Systems modeling, Scanning electron microscopy
J. Micro/Nanolith. MEMS MOEMS 8(2), 023015 (1 April 2009) https://doi.org/10.1117/1.3129823
TOPICS: Microelectromechanical systems, Computer security, Computing systems, Optoelectronics, Magnetism, Prototyping, Sensors, Signal processing, Curium
J. Micro/Nanolith. MEMS MOEMS 8(2), 023020 (1 April 2009) https://doi.org/10.1117/1.3152001
TOPICS: Actuators, Microelectromechanical systems, Microactuators, Convection, Thermal modeling, Finite element methods, Surface micromachining, Electronics, Solids, Silicon
COMMUNICATIONS
J. Micro/Nanolith. MEMS MOEMS 8(2), 029701 (1 April 2009) https://doi.org/10.1117/1.3155516
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