journal of micro nanolithography mems and moems
VOL. 8 · NO. 2 | April 2009
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 8(2), 020101 (1 April 2009) https://doi.org/10.1117/1.3160634
TOPICS: Digital libraries, Internet, Multimedia, Video
Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS
J. Micro/Nanolith. MEMS MOEMS 8(2), 021101 (1 April 2009) https://doi.org/10.1117/1.3155403
TOPICS: Microelectromechanical systems, BioMEMS, Transducers, Microopto electromechanical systems, Nanotechnology, Microfluidics, Materials science, Sensors, Actuators, Packaging
Qiaole Zhao, Qing-An Huang, Yu-Cheng Lin
J. Micro/Nanolith. MEMS MOEMS 8(2), 021102 (1 April 2009) https://doi.org/10.1117/1.3091940
TOPICS: Microfluidics, Numerical analysis, Polymers, Resistance, Computer simulations, Atmospheric modeling, Microelectromechanical systems, Shape analysis, Glasses, Temperature metrology
Yun-Yang Ling, Yechi Zhang, Weijia Wen, Patrick Tabeling, Yi-Kuen Lee
J. Micro/Nanolith. MEMS MOEMS 8(2), 021103 (1 April 2009) https://doi.org/10.1117/1.3124191
TOPICS: Microfluidics, Packaging, Glasses, Plasma treatment, Microelectromechanical systems, Switching, Control systems, Photoresist materials, Copper, Semiconducting wafers
Dan Sun, Hai-Qing Gong
J. Micro/Nanolith. MEMS MOEMS 8(2), 021104 (1 April 2009) https://doi.org/10.1117/1.3100201
TOPICS: Electrodes, 3D displays, Dielectrics, Liquids, Silicon, 3D image processing, Glasses, Coating, Minerals, Sun
Jin-Cherng Shyu, Ching-Jiun Lee, Chung-Sheng Wei
J. Micro/Nanolith. MEMS MOEMS 8(2), 021105 (1 April 2009) https://doi.org/10.1117/1.3122367
TOPICS: Microfluidics, Chemical reactions, Platinum, Semiconducting wafers, Hydrogen, Liquids, Diffusion, Optical lithography, Wafer bonding, Oxygen
Tzong-Shyng Leu, Chih-Yuan Weng
J. Micro/Nanolith. MEMS MOEMS 8(2), 021106 (1 April 2009) https://doi.org/10.1117/1.3142967
TOPICS: Particles, Dielectrophoresis, Electrodes, Numerical simulations, Error analysis, Microfluidics, Dielectrics, Numerical analysis, Optoelectronic devices, Computer simulations
Han Cheng, Kin-Fong Lei, Kit Ying Choy, Larry Chow
J. Micro/Nanolith. MEMS MOEMS 8(2), 021107 (1 April 2009) https://doi.org/10.1117/1.3152003
TOPICS: Electrodes, Molecules, Microfluidics, Solar concentrators, Particles, Gold, Glasses, Numerical simulations, Microscopes, Luminescence
Tae-Hoon Lee, Alexander Efremov, Yong-Hyun Ham, Sun Jin Yun, Nam-Ki Min, Munpyo Hong, Kwang-Ho Kwon
J. Micro/Nanolith. MEMS MOEMS 8(2), 021110 (1 April 2009) https://doi.org/10.1117/1.3100423
TOPICS: Chlorine, Argon, Etching, Plasma, Ions, Autoregressive models, Vanadium, Plasma etching, Chemical species, Sputter deposition
C. chung, W. Chang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021111 (1 April 2009) https://doi.org/10.1117/1.3116126
TOPICS: Metals, Nickel, Ions, Electroplating, Diffusion, Polymethylmethacrylate, Gas lasers, Carbon monoxide, Convection, Plating
J. Micro/Nanolith. MEMS MOEMS 8(2), 021112 (1 April 2009) https://doi.org/10.1117/1.3091941
TOPICS: Microelectromechanical systems, Aluminum, Acoustics, Etching, Capacitance, Finite element methods, Silicon, Scanning electron microscopy, Electrodes, Mechanical sensors
Hyun Woo Yu, Chi Hoon Lee, Phill Gu Jung, Bosung Shin, Joon-Ho Kim, Kyu-Youn Kwang, Jong Soo Ko
J. Micro/Nanolith. MEMS MOEMS 8(2), 021113 (1 April 2009) https://doi.org/10.1117/1.3129824
TOPICS: Ultrasonics, Polymethylmethacrylate, Polymers, Nickel, Scanning electron microscopy, Silicon, Microfabrication, Deep reactive ion etching, Photoresist materials, Oxidation
Jui-Che Tsai, Ren-Jie Lai, Chun-Yi Yin, Dian-Sheng Chen, Ching-Kai Shen, Yao-Tien Chang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021114 (1 April 2009) https://doi.org/10.1117/1.3100208
TOPICS: Actuators, Nickel, Metals, Silicon, Finite element methods, Polysomnography, Scanning electron microscopy, Microelectromechanical systems, Temperature metrology, Etching
Toru Anzai, Shigeo Yamaguchi
J. Micro/Nanolith. MEMS MOEMS 8(2), 021115 (1 April 2009) https://doi.org/10.1117/1.3151998
TOPICS: Microorganisms, Copper, Thermoelectric materials, Head, Electrodes, Metals, Photography, Bismuth, Tellurium, Resistance
David Myers, Kan Bun Cheng, Babak Jamshidi, Robert Azevedo, Debbie Senesky, Li Chen, Mehran Mehregany, Muthu Wijesundara, Albert Pisano
J. Micro/Nanolith. MEMS MOEMS 8(2), 021116 (1 April 2009) https://doi.org/10.1117/1.3143192
TOPICS: Silicon carbide, Sensors, Microelectromechanical systems, Silicon, Oscillators, Electronics, Etching, Environmental sensing, Resonators, Actuators
Shinji Morita, Takashi Mineta, Eiji Makino, Akihiro Umino, Takahiro Kawashima, Takayuki Shibata
J. Micro/Nanolith. MEMS MOEMS 8(2), 021117 (1 April 2009) https://doi.org/10.1117/1.3142970
TOPICS: Silicon, Atomic force microscopy, Crystals, Anisotropic etching, Actuators, Etching, Atomic force microscope, Photomasks, Chromium, Oxidation
Jinxing Liang, Toshitsugu Ueda
J. Micro/Nanolith. MEMS MOEMS 8(2), 021118 (1 April 2009) https://doi.org/10.1117/1.3134087
TOPICS: Microelectromechanical systems, Sensors, Packaging, Electrodes, Quartz, Semiconducting wafers, Capacitance, Gold, Scanning electron microscopy, Integrated circuits
Chia-Lin Chang, Chih-Wei Chang, Chen-Ming Hsu, Ching-Hsing Luo, Jin-Chern Chiou
J. Micro/Nanolith. MEMS MOEMS 8(2), 021120 (1 April 2009) https://doi.org/10.1117/1.3124190
TOPICS: Electrodes, Sensors, Skin, Electrocardiography, Signal processing, Transceivers, Electroencephalography, Microcontrollers, Interfaces, Biomedical optics
Chi-Ming Fang, Shih-Yung Pao, Chi-Yuan Lee, Yi-Chang Lu, Pei-Yen Chen, Yung-Chung Chin, Pei-Zen Chang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021121 (1 April 2009) https://doi.org/10.1117/1.3094749
TOPICS: Acoustics, Wireless communications, Resonators, Device simulation, Image filtering, Radio frequency circuits, Circuit switching, Electrodes, Roads, Signal attenuation
Feixiang Ke, Jianmin Miao, Zhihong Wang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021122 (1 April 2009) https://doi.org/10.1117/1.3100204
TOPICS: Switches, Microelectromechanical systems, Gold, Metals, Silicon, Semiconducting wafers, Resistance, Reliability, Multilayers, Ruthenium
Fu-Xue Zhang, Qing-Wen Yan, Wei Zhang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021130 (1 April 2009) https://doi.org/10.1117/1.3122366
TOPICS: Gyroscopes, Silicon, Sensors, Roads, Microelectromechanical systems, Information science, Information technology, Sensor technology, Telecommunications
R. Tsuji, K. Endo, Masaki Shuzo, Ichiro Yamada, Jean-Jacques Delaunay
J. Micro/Nanolith. MEMS MOEMS 8(2), 021140 (1 April 2009) https://doi.org/10.1117/1.3094748
TOPICS: Palladium, Transmittance, Surface plasmons, Hydrogen, Signal attenuation, Infrared radiation, Optical properties, Silicon, Interfaces, Sensors
Z. M. Wu, Zhenjie Zhao, X. L. Yang, L. Jiang, Junyong Kang, Shuping Li, K. Huang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021150 (1 April 2009) https://doi.org/10.1117/1.3094747
TOPICS: Resonance enhancement, Magnetism, Physics, Silicon, Magnetic sensors, Annealing, Magnetostrictive materials, Magnetic semiconductors, Semiconductors, Iron
Bin-Hao Chen, Chin-Ho Chuang, Shing-Cheng Chang, Fang-Hei Tsau, Ming-Shan Jeng, Cha'o-Kuang Chen
J. Micro/Nanolith. MEMS MOEMS 8(2), 021151 (1 April 2009) https://doi.org/10.1117/1.3143041
TOPICS: Carbon nanotubes, Chemical species, Picosecond phenomena, Heat flux, Carbon, Thermal modeling, 3D modeling, Phonons, Thermal effects, Roads
Ming-Li Ke, Ray-Hua Horng, Yao-Cheng Tsai, Guan-Wei Chen, Chao-Chih Chang
J. Micro/Nanolith. MEMS MOEMS 8(2), 021160 (1 April 2009) https://doi.org/10.1117/1.3142971
TOPICS: Magnetism, Aluminum, Microelectromechanical systems, Device simulation, Silicon, Acoustics, Structural design, Finite element methods, Electronics, Roads
Hongzhong Liu, Yucheng Ding, Weitao Jiang, Qin Lian, Lei Yin, Yongsheng Shi, Bingheng Lu
J. Micro/Nanolith. MEMS MOEMS 8(2), 021170 (1 April 2009) https://doi.org/10.1117/1.3142966
TOPICS: Nanoimprint lithography, Distortion, Polymers, Organic photovoltaics, Photovoltaics, Lithography, Photoresist processing, Semiconducting wafers, Diamond, Ultraviolet radiation
Jinkui Chu, Xianggao Piao, Limin Jian, Hui Lin
J. Micro/Nanolith. MEMS MOEMS 8(2), 021180 (1 April 2009) https://doi.org/10.1117/1.3152000
TOPICS: Radioisotopes, Doping, Semiconductors, Metals, Resistance, Diffusion, Microelectromechanical systems, Chemical species, Prototyping, Calibration
De-Yi Chiou, Mu-Yueh Chen
J. Micro/Nanolith. MEMS MOEMS 8(2), 021190 (1 April 2009) https://doi.org/10.1117/1.3152235
TOPICS: Electromechanical design, Electrodes, Finite element methods, Capacitance, Optimization (mathematics), Transducers, Ultrasonics, Silicon, Etching, 3D modeling
Special Section on Extreme-Ultraviolet Interference Lithography
J. Micro/Nanolith. MEMS MOEMS 8(2), 021201 (1 April 2009) https://doi.org/10.1117/1.3156651
TOPICS: Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Photoresist developing, Photoresist materials, Interferometry, Imaging systems, Fringe analysis, Optical lithography, Synchrotrons
J. Micro/Nanolith. MEMS MOEMS 8(2), 021202 (1 April 2009) https://doi.org/10.1117/1.3112008
TOPICS: Interferometers, Extreme ultraviolet, Wavefronts, Spherical lenses, Optical design, Visibility, Lithography, Extreme ultraviolet lithography, Synchrotrons, Diffraction gratings
J. Micro/Nanolith. MEMS MOEMS 8(2), 021203 (1 April 2009) https://doi.org/10.1117/1.3112006
TOPICS: Modulation, Diffraction gratings, Photomasks, Diffraction, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Interferometry, Fringe analysis, Interferometers
Vaida Auzelyte, Christian Dais, Patrick Farquet, Detlev Gruetzmacher, Laura Heyderman, Feng Luo, Sven Olliges, Celestino Padeste, Pratap Sahoo, Tom Thomson, Audrey Turchanin, Christian David, Harun Solak
J. Micro/Nanolith. MEMS MOEMS 8(2), 021204 (1 April 2009) https://doi.org/10.1117/1.3116559
TOPICS: Magnetism, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Polymers, Photomasks, Gold, Proteins, Nanolithography, Nanowires
J. Micro/Nanolith. MEMS MOEMS 8(2), 021205 (1 April 2009) https://doi.org/10.1117/1.3124188
TOPICS: Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Lithography, Photomasks, Contamination, Photoresist materials, Semiconducting wafers, Printing, Optical lithography
Przemyslaw Wachulak, Lukasz Urbanski, Maria Capeluto, D. Hill, Willie Rockward, Claudio Iemmi, Erik Anderson, Carmen Menoni, Jorge Rocca, Mario Marconi
J. Micro/Nanolith. MEMS MOEMS 8(2), 021206 (1 April 2009) https://doi.org/10.1117/1.3129837
TOPICS: Extreme ultraviolet, Interferometry, Lithography, Interferometers, Mirrors, Diffraction gratings, Wavefronts, Extreme ultraviolet lithography, Capillaries, Synchrotrons
J. Micro/Nanolith. MEMS MOEMS 8(2), 021207 (1 April 2009) https://doi.org/10.1117/1.3134094
TOPICS: Photomasks, Extreme ultraviolet, Interferometry, Plasma, Lithography, Mirrors, Imaging systems, Holography, Reflectivity, Interferometers
Articles
J. Micro/Nanolith. MEMS MOEMS 8(2), 023001 (1 April 2009) https://doi.org/10.1117/1.3116127
TOPICS: Chromium, Etching, Line edge roughness, Double patterning technology, Photomasks, Photoresist processing, Image registration, Lithography, Scanning electron microscopy, Inspection
J. Micro/Nanolith. MEMS MOEMS 8(2), 023005 (1 April 2009) https://doi.org/10.1117/1.3124189
TOPICS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography
Liang Zhu, Yingchun Zhang, Yili Gu, Steve Yang, Xiaohui Kang
J. Micro/Nanolith. MEMS MOEMS 8(2), 023008 (1 April 2009) https://doi.org/10.1117/1.3155515
TOPICS: Lithography, Critical dimension metrology, Double patterning technology, SRAF, Scanners, Image processing, Photomasks, Optical proximity correction, Resolution enhancement technologies, Semiconducting wafers
Yun-Bo Yi, Amir Rahafrooz, Siavash Pourkamali
J. Micro/Nanolith. MEMS MOEMS 8(2), 023010 (1 April 2009) https://doi.org/10.1117/1.3129830
TOPICS: Resonators, Microfluidics, Silicon, Chemical elements, Microelectromechanical systems, Finite element methods, Fluid dynamics, Nanoelectromechanical systems, Systems modeling, Scanning electron microscopy
Weiping Zhang, Wenyuan Chen, Shengyong Li, Minhua Feng, Shunyi Tan
J. Micro/Nanolith. MEMS MOEMS 8(2), 023015 (1 April 2009) https://doi.org/10.1117/1.3129823
TOPICS: Microelectromechanical systems, Computer security, Computing systems, Optoelectronics, Magnetism, Prototyping, Sensors, Signal processing, Curium
Jorge Varona, Margarita Tecpoyotl-Torres, Anas Hamoui, Jesus Ecobedo-Alatorre, Jose Sánchez-Mondragón
J. Micro/Nanolith. MEMS MOEMS 8(2), 023020 (1 April 2009) https://doi.org/10.1117/1.3152001
TOPICS: Actuators, Microelectromechanical systems, Microactuators, Convection, Thermal modeling, Finite element methods, Surface micromachining, Electronics, Solids, Silicon
COMMUNICATIONS
J. Micro/Nanolith. MEMS MOEMS 8(2), 029701 (1 April 2009) https://doi.org/10.1117/1.3155516
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