Wireless surface acoustic wave chemical sensor for simultaneous measurement of CO2 and humidity

Wen Wang; Chunbae Lim; Kee-Keun Lee; Sang Sik Yang

doi:10.1117/1.3158610

1 July 2009 Wireless surface acoustic wave chemical sensor for simultaneous measurement of CO₂ and humidity

Wen Wang, Chunbae Lim, Kee-Keun Lee, Sang Sik Yang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 3, 031306 (July 2009). https://doi.org/10.1117/1.3158610

Abstract

A 440-MHz wireless and passive surface acoustic wave (SAW) microsensor was developed for simultaneous measurement of CO₂ and relative humidity (RH). The developed SAW microsensor was composed of SAW reflective delay lines structured by an interdigital transducer (IDT) and several shorted grating reflectors, CO₂, and water vapor-sensitive films. A theoretical model was established to predict the response mechanism of the polymer-coated SAW gas sensor. Infusion of CO₂ into the chamber and humidity changes induced large phase shifts in the reflection peaks. Good linearity and repeatability were observed in the CO₂ concentration of 0~400 ppm and 20~80% RH. The obtained sensitivity was ~2° ppm⁻¹ for CO₂ detection and 7.45°/%RH for humidity sensing. Temperature and humidity effects were also investigated during the sensitivity evaluation process.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Wen Wang, Chunbae Lim, Kee-Keun Lee, and Sang Sik Yang "Wireless surface acoustic wave chemical sensor for simultaneous measurement of CO₂ and humidity," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(3), 031306 (1 July 2009). https://doi.org/10.1117/1.3158610

Published: 1 July 2009

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