In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing

Changsoo Jang; Arindam Goswami; Bongtae Han; Suk-Jin Ham

doi:10.1117/1.3227904

1 October 2009 In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing

Changsoo Jang, Arindam Goswami, Bongtae Han, Suk-Jin Ham

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 4, 043025 (October 2009). https://doi.org/10.1117/1.3227904

Abstract

A novel inverse approach is proposed for in situ measurement of gas diffusion properties of polymeric seals used in microelectromechanical systems (MEMS) packages. The cavity pressure evolution of a polymer-sealed MEMS package subjected to a constant bombing pressure is documented as a function of time using classical interferometry, and the diffusion properties of the polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymeric seal. The method is implemented to determine the helium diffusivity and solubility of a polymeric seal.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Changsoo Jang, Arindam Goswami, Bongtae Han, and Suk-Jin Ham "In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(4), 043025 (1 October 2009). https://doi.org/10.1117/1.3227904

Published: 1 October 2009

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