Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

Lidai Wang; James K. Mills; William L. Cleghorn

doi:10.1117/1.3256006

1 October 2009 Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

Lidai Wang, James K. Mills, William L. Cleghorn

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 4, 043035 (October 2009). https://doi.org/10.1117/1.3256006

Abstract

We present a novel approach to construct 3-D 1×N rotary micromirrors, which are fundamental components in optical switching systems. A rotary micromirror consists of two microparts: a rotary micromotor and a micromirror. Both of the two microparts are fabricated with PolyMUMPs,^TM (MEMSCAP, Research Triangle Park, North Carolina), a surface micromachining process. A sequential robotic microassembly process is developed to join the two microparts together to construct the 3-D device. To achieve high positioning accuracy and strong mechanical connection, the micromirror is joined to the micromotor using an adhesive mechanical fastener. The mechanical microjoint has self-alignment capability and provides a temporary joint between the two microparts. The adhesive bonding creates a strong permanent connection between the two microparts. The adhesive mechanical fastener does not require extra supporting plates to fix the micromirror, which simplifies the microassembly process and makes it possible to automatically assemble the rotary micromirror. A hybrid manipulation strategy, which includes pick-and-place and pushing-based micromanipulations, is utilized to assemble the micromirror onto the micromotor. The pick-and-place manipulation has the ability to globally position the micromirror with multiple degrees of freedom. The pushing-based manipulation can achieve high positioning accuracy. This novel approach provides great flexibility and high accuracy for assembling the complex micromirror.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Lidai Wang, James K. Mills, and William L. Cleghorn "Novel approach for microassembly of three-dimensional rotary MOEMS mirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(4), 043035 (1 October 2009). https://doi.org/10.1117/1.3256006

Published: 1 October 2009

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available