journal of micro nanolithography mems and moems
VOL. 9 · NO. 3 | July 2010
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 9(3), 030101 (1 July 2010) https://doi.org/10.1117/1.3497356
TOPICS: Extreme ultraviolet, Lithography, X-rays, Printing, Heart, X-ray lithography
Special Section on BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors
J. Micro/Nanolith. MEMS MOEMS 9(3), 031001 (1 July 2010) https://doi.org/10.1117/1.3496936
TOPICS: BioMEMS, Sensors, Nanolithography, Nanotechnology, Microelectromechanical systems, Microopto electromechanical systems, Medicine, Chemical fiber sensors, Nanostructuring, Particles
Shaw-Hwa Parng, Philip-Leslie Drake, Hong-Wen Chang, Yuh-Jiuan Lin
J. Micro/Nanolith. MEMS MOEMS 9(3), 031002 (1 July 2010) https://doi.org/10.1117/1.3432487
Yanan Wen, Yuqiang Liu, Yuqiang Yang, Limin An, Weisi Song, Zhenling Yang
J. Micro/Nanolith. MEMS MOEMS 9(3), 031003 (1 July 2010) https://doi.org/10.1117/1.3446806
Takashi Mineta, Hiroko Takeuchi, Eiji Makino, Gen Hashiguchi
J. Micro/Nanolith. MEMS MOEMS 9(3), 031004 (1 July 2010) https://doi.org/10.1117/1.3455369
J. Micro/Nanolith. MEMS MOEMS 9(3), 031005 (1 July 2010) https://doi.org/10.1117/1.3455343
Yung-Chiang Chung, Li-Wei Lai, Lung-Jieh Yang, Wei-Jie Liao
J. Micro/Nanolith. MEMS MOEMS 9(3), 031006 (1 July 2010) https://doi.org/10.1117/1.3455371
Chang-Hsiao Chen, Shih-Chang Chuang, Yu-Tao Lee, Yen-Chung Chang, Shih-Rung Yeh, Da-Jeng Yao
J. Micro/Nanolith. MEMS MOEMS 9(3), 031007 (1 July 2010) https://doi.org/10.1117/1.3455409
Li-Ming Chu, Jin-Yuan Lai, Wang-Long Li, Chi-Hui Chien
J. Micro/Nanolith. MEMS MOEMS 9(3), 031008 (1 July 2010) https://doi.org/10.1117/1.3455366
Ching-Liang Wei, Ying-Chung Chen, Kuo-Sheng Kao, Kuang-Tsung Wu, Da-Long Cheng, Po-Tsung Hsieh
J. Micro/Nanolith. MEMS MOEMS 9(3), 031009 (1 July 2010) https://doi.org/10.1117/1.3459938
Li Chun Wang, Kea Tiong Tang, Cheng-Tzu Kuo, Cheng-Long Ho, Shiao-Ray Lin, Yuh Sung, Chang-Ping Chang
J. Micro/Nanolith. MEMS MOEMS 9(3), 031010 (1 July 2010) https://doi.org/10.1117/1.3466797
Chun-Han Wu, Wen-Syang Hsu, Kuo-Wei Fan, Yu-Ling Lin, Yu-Cheng Lin
J. Micro/Nanolith. MEMS MOEMS 9(3), 031011 (1 July 2010) https://doi.org/10.1117/1.3491363
TOPICS: Microfluidics, Optical discs, Birefringence, Polymers, Surface roughness, Nickel, Optics manufacturing, Mirrors, Diffractive optical elements, Manufacturing
Articles
J. Micro/Nanolith. MEMS MOEMS 9(3), 033001 (1 July 2010) https://doi.org/10.1117/1.3459941
J. Micro/Nanolith. MEMS MOEMS 9(3), 033002 (1 July 2010) https://doi.org/10.1117/1.3459937
Sherjang Singh, Ssuwei Chen, Kosta Selinidis, Brian Fletcher, Ian McMackin, Ecron Thompson, Douglas Resnick, Peter Dress, Uwe Dietze
J. Micro/Nanolith. MEMS MOEMS 9(3), 033003 (1 July 2010) https://doi.org/10.1117/1.3462815
J. Micro/Nanolith. MEMS MOEMS 9(3), 033004 (1 July 2010) https://doi.org/10.1117/1.3469817
Hongwen Sun, Guogao Liu, Shanming Lin, Jingquan Liu, Di Chen
J. Micro/Nanolith. MEMS MOEMS 9(3), 033005 (1 July 2010) https://doi.org/10.1117/1.3469818
J. Micro/Nanolith. MEMS MOEMS 9(3), 033006 (1 July 2010) https://doi.org/10.1117/1.3475951
J. Micro/Nanolith. MEMS MOEMS 9(3), 033007 (1 July 2010) https://doi.org/10.1117/1.3478238
Chiung-I Lee, Chih-Hsiang Ko, Tsun-Che Huang, Feng-Chia Hsu
J. Micro/Nanolith. MEMS MOEMS 9(3), 033008 (1 July 2010) https://doi.org/10.1117/1.3478225
TOPICS: Switches, Microelectromechanical systems, Actuators, Switching, Semiconductors, Capacitance, Dielectrics, Etching, Metals, Standards development
Mingli Ding, Tingwei Liang, Jintao Yu, Qi Wang
J. Micro/Nanolith. MEMS MOEMS 9(3), 033009 (1 July 2010) https://doi.org/10.1117/1.3481145
TOPICS: Error analysis, Gyroscopes, Microelectromechanical systems, Calibration, Digital signal processing, Navigation systems, Manufacturing, Sensors, Global Positioning System, Sensing systems
Jr-Ming Lai, Jenn-Der Lin, Kung Linliu
J. Micro/Nanolith. MEMS MOEMS 9(3), 033010 (1 July 2010) https://doi.org/10.1117/1.3486201
TOPICS: Liquids, Transducers, Satellites, Microfluidics, Interfaces, Actuators, Head, Printing, Capillaries, Computer simulations
J. Micro/Nanolith. MEMS MOEMS 9(3), 033011 (1 July 2010) https://doi.org/10.1117/1.3486202
TOPICS: Semiconducting wafers, Silicon, Array processing, Atomic layer deposition, Nanolithography, Scanning electron microscopy, Electron beam lithography, Solid state electronics, Silicon films, Etching
Pa-Yee Tsai, Chi Chang Hsieh, Yan-Huei Li
J. Micro/Nanolith. MEMS MOEMS 9(3), 033012 (1 July 2010) https://doi.org/10.1117/1.3487740
TOPICS: Light emitting diodes, Packaging, Binary data, Microlens, LED lighting, Light sources, Light sources and illumination, Receivers, Light, Ray tracing
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