1 July 2010 Special Section Guest Editorial: BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors
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This PDF file contains the editorial “Special Section Guest Editorial: BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors” for JM3 Vol. 9 Issue 03
Lin: Special Section Guest Editorial: BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

Researchers in the theory, design, fabrication, and characterization of MEMS/NEMS, bioMEMS, and nanotechnologies have been making tremendous progress in recent years. In this special section of the Journal of Micro/Nanolithography, MEMS, and MOEMS ( JM3 ), we are pleased to present selected papers from the IEEE International Conference on Nano/Molecular Engineering & Medicine (IEEE-NANOMED) held October 2009 in Taiwan.

The special section includes papers from the following subtopical areas: BioMEMS; theory, design, fabrication, and characterization of MEMS/NEMS; physical and chemical sensors; theory, design, fabrication, and characterization of nanostructured materials for biological and medical applications; and biological applications using nanoscale particles, devices, and systems.

I would like to thank Dr. Burn J. Lin, the Editor-in-Chief of JM3 , for providing me with the opportunity to act as the guest editor of this special section.

© (2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yu-Cheng Lin, Yu-Cheng Lin, } "Special Section Guest Editorial: BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 031001 (1 July 2010). https://doi.org/10.1117/1.3496936 . Submission:
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