Researchers in the theory, design, fabrication, and characterization of MEMS/NEMS, bioMEMS, and nanotechnologies have been making tremendous progress in recent years. In this special section of the Journal of Micro/Nanolithography, MEMS, and MOEMS ( ${\mathrm{JM}}^3$ ), we are pleased to present selected papers from the IEEE International Conference on Nano/Molecular Engineering & Medicine (IEEE-NANOMED) held October 2009 in Taiwan.

The special section includes papers from the following subtopical areas: BioMEMS; theory, design, fabrication, and characterization of MEMS/NEMS; physical and chemical sensors; theory, design, fabrication, and characterization of nanostructured materials for biological and medical applications; and biological applications using nanoscale particles, devices, and systems.

I would like to thank Dr. Burn J. Lin, the Editor-in-Chief of ${\mathrm{JM}}^3$ , for providing me with the opportunity to act as the guest editor of this special section.