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1 October 2010 Special Section Guest Editorial: Line-Edge Roughness
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Chris A. Mack and Will Conley "Special Section Guest Editorial: Line-Edge Roughness," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(4), 041201 (1 October 2010). https://doi.org/10.1117/1.3532953
Published: 1 October 2010
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