The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM 3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry. Key subject areas include the science, development, and practice of lithographic, computational, etch, and integration technologies. In this context the electronics industry includes but is not limited to integrated circuits and multichip modules, and advanced packaging with features in the submicron regime.
On the cover: The figure is from the paper "Investigating extreme ultraviolet radiation chemistry with first-principles quantum chemistry calculations" by Jonathan H. Ma et al., from Vol. 19, Issue 3.
Receive Email Alerts
