1 April 2011 Photoelectrical response properties of a linear high-temperature superconducting sensor coupled with a refractive microlens array
Xinyu Zhang, Hui Li, Kan Liu, Jun Luo, Chang-Sheng Xie, An Ji, Tianxu Zhang
Author Affiliations +
Abstract
The photoelectrical response properties of a linear high-temperature (high-Tc) superconducting sensor coupled with a refractive microlens array are investigated. The theoretical analysis and measurements demonstrate that the photoelectrical response uniformity of superconducting sensors is not always improved simultaneously with the enhancement of the common photoelectrical performances of superconducting sensors, such as the responsivity, the noise equivalent power, and the detectivity, after coupling cylinder microlenses with them. A linear 8-pixel high-Tc YBa2Cu3O7-δ superconducting thin film sensor and a quartz microlens array of 32×64, are designed and then fabricated and finally coupled for detection infrared radiation in the wavelength range of 1 to 5 μm. The superconducting sensors are characterized through a common measurement method.
©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Xinyu Zhang, Hui Li, Kan Liu, Jun Luo, Chang-Sheng Xie, An Ji, and Tianxu Zhang "Photoelectrical response properties of a linear high-temperature superconducting sensor coupled with a refractive microlens array," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(2), 023011 (1 April 2011). https://doi.org/10.1117/1.3590939
Published: 1 April 2011
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KEYWORDS
Sensors

Microlens

Superconductors

Quartz

Microlens array

Infrared sensors

Photoresist materials

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