Hybrid metrology co-optimization of critical dimension scanning electron microscope and optical critical dimension

Alok Vaid; Carmen Osorio; Jamie Tsai; Cornel Bozdog; Matthew Sendelbach; Eyal Grubner; Roy Koret; Shay Wolfling

doi:10.1117/1.JMM.13.4.041413

8 December 2014 Hybrid metrology co-optimization of critical dimension scanning electron microscope and optical critical dimension

Alok Vaid, Carmen Osorio, Jamie Tsai, Cornel Bozdog, Matthew Sendelbach, Eyal Grubner, Roy Koret, Shay Wolfling

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 4, 041413 (December 2014). https://doi.org/10.1117/1.JMM.13.4.041413

Abstract

Work using the concept of a co-optimization-based metrology hybridization is presented. Hybrid co-optimization involves the combination of data from two or more metrology tools such that the output of each tool is improved by the output of the other tool. Here, the image analysis parameters from a critical dimension scanning electron microscope (CD-SEM) are modulated by the profile information from optical critical dimension (OCD, or scatterometry), while the OCD-extracted profile is concurrently optimized through addition of the CD-SEM CD results. The test vehicle utilized is the 14-nm technology node-based FinFET high-k/interfacial layer (HK/IL) structure. When compared with the nonhybrid approach, the correlation to reference measurements of the HK layer thickness measurement using hybrid co-optimization resulted in an improvement in relative accuracy of about 40% and in R² from 0.81 to 0.91. The measurement of the IL thickness also shows an improvement with hybrid co-optimization: better matching to the expected conditions as well as data that contain less noise.

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Alok Vaid, Carmen Osorio, Jamie Tsai, Cornel Bozdog, Matthew Sendelbach, Eyal Grubner, Roy Koret, and Shay Wolfling "Hybrid metrology co-optimization of critical dimension scanning electron microscope and optical critical dimension," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 041413 (8 December 2014). https://doi.org/10.1117/1.JMM.13.4.041413

Published: 8 December 2014

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