Investigation, modeling, and experiment of an MEMS S-springs vibrating ring gyroscope

Zhiwei Kou; Jun Liu; Huiliang Cao; Ziqi Han; Yanan Sun; Yunbo Shi; Senxin Ren; Yingjie Zhang

doi:10.1117/1.JMM.17.1.015001

16 January 2018 Investigation, modeling, and experiment of an MEMS S-springs vibrating ring gyroscope

Zhiwei Kou, Jun Liu, Huiliang Cao, Ziqi Han, Yanan Sun, Yunbo Shi, Senxin Ren, Yingjie Zhang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue 1, 015001 (January 2018). https://doi.org/10.1117/1.JMM.17.1.015001

Abstract

This study presents a microelectromechanical systems S-springs vibration ring gyroscope (MSVRG), which is driven by electrostatic force and detected by capacitance. First, a ring resonator structure with eight S-shaped symmetrical supporting springs is developed, and the capacitor electrodes are designed according to the vibration characteristics of the ring resonator. Then, a precise equivalent stiffness model of MSVRG is established based on the vibration mechanics and the Cassette theorem, which can be employed for any other ring gyroscope with differently shaped springs. Moreover, the mode resonant frequency error of between experiments, finite-element analysis (FEA) and theory calculation, is 10.54% and 3.76%, respectively. After that, the process of MSVRG structure is introduced and the structure is manufactured, and the theory calculation and FEA value with processed parameters have 1.19% and 4.59% difference with resonant frequency tested value, respectively. Finally, the static performance of the fabricated MSVRG is tested, and the bias instability is about 0.0119 deg/s and angle random walk is about 0.0359 deg/s1/2 at room temperature.

Citation Download Citation

Zhiwei Kou, Jun Liu, Huiliang Cao, Ziqi Han, Yanan Sun, Yunbo Shi, Senxin Ren, and Yingjie Zhang "Investigation, modeling, and experiment of an MEMS S-springs vibrating ring gyroscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 17(1), 015001 (16 January 2018). https://doi.org/10.1117/1.JMM.17.1.015001

Received: 17 September 2017; Accepted: 18 December 2017; Published: 16 January 2018

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