0.5λ/NA resolution limit" />
Translator Disclaimer
13 February 2021 Clarifications on the 0.5λ/NA resolution limit
Author Affiliations +
Abstract

Abbe’s reasoning behind his expression of the resolution limit can be seen from his 1876 letter to J. W. Stephenson. Helmholtz came up with the same resolution limit expression almost at the same time as Abbe in another way. The numerical aperture (NA  ≡  n sin θ) part of the expression is a consequence of the sine condition, which must be fulfilled for aplanatic imaging.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2021/$28.00 © 2021 SPIE
Anthony Yen "Clarifications on the 0.5λ/NA resolution limit," Journal of Micro/Nanopatterning, Materials, and Metrology 20(1), 010501 (13 February 2021). https://doi.org/10.1117/1.JMM.20.1.010501
Received: 9 December 2020; Accepted: 22 January 2021; Published: 13 February 2021
JOURNAL ARTICLE
6 PAGES


SHARE
Advertisement
Advertisement
Back to Top