Special Section Guest Editorial: Control of Integrated Circuit Patterning Variance, Part 5: Pattern Placement, Critical Dimension, and Edge-to-Edge Overlay

Alexander Starikov

doi:10.1117/1.JMM.22.4.041601

21 December 2023 Special Section Guest Editorial: Control of Integrated Circuit Patterning Variance, Part 5: Pattern Placement, Critical Dimension, and Edge-to-Edge Overlay

Alexander Starikov

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Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 22, Issue 4, 041601 (December 2023). https://doi.org/10.1117/1.JMM.22.4.041601

Abstract

Guest editor Alexander Starikov introduces the Special Section on Control of Integrated Circuit Patterning Variance, Part 5: Pattern Placement, Critical Dimension, and Edge-to-Edge Overlay.

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Alexander Starikov "Special Section Guest Editorial: Control of Integrated Circuit Patterning Variance, Part 5: Pattern Placement, Critical Dimension, and Edge-to-Edge Overlay," Journal of Micro/Nanopatterning, Materials, and Metrology 22(4), 041601 (21 December 2023). https://doi.org/10.1117/1.JMM.22.4.041601

Published: 21 December 2023

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