Design and characterization of a microheater array device fabricated with SwIFT-LiteTM

Layne D. Williams; Murat Okandan; Steve Blair

doi:10.1117/1.3013457

1 October 2008 Design and characterization of a microheater array device fabricated with SwIFT-Lite^TM

Layne D. Williams, Murat Okandan, Steve Blair

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 4, 043035 (October 2008). https://doi.org/10.1117/1.3013457

Abstract

A microheater array device is designed and fabricated using the SwIFT-Lite^TM process at Sandia National Laboratories. The device contains 18 individually controllable microheaters in a 3×6 array on a silicon substrate. The microheater array device was designed for use as a biosensor platform with a waveguide for real-time detection of DNA hybridization and melting as well as microfluidics for sample delivery. The design process including modeling, fabrication, and characterization of the heaters and waveguide is detailed. A FRET (florescence resonance energy transfer) system for DNA melting experiments is described, and the associated surface chemistry and microfluidic systems are discussed.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Layne D. Williams, Murat Okandan, and Steve Blair "Design and characterization of a microheater array device fabricated with SwIFT-Lite^TM," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(4), 043035 (1 October 2008). https://doi.org/10.1117/1.3013457

Published: 1 October 2008

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