Novel fabrication method of corrugated long-period fiber gratings by thick SU-8 photoresist and wet-etching technique

Chia-Chin Chiang; Hao-Jhen Chang; Jin-Shun Kuo

doi:10.1117/1.3478238

1 July 2010 Novel fabrication method of corrugated long-period fiber gratings by thick SU-8 photoresist and wet-etching technique

Chia-Chin Chiang, Hao-Jhen Chang, Jin-Shun Kuo

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 3, 033007 (July 2010). https://doi.org/10.1117/1.3478238

Abstract

A novel fabrication method for corrugated long-period fiber gratings (CLPFG) is presented in this study. The patterned SU-8 photoresist is used as a double-side stopper layer for a wet-etching process to fabricate the CLPFG. Presented in this research are four types of CLPFG with periods of 660, 670, 680, and 690 µm and resonant wavelengths of 1531, 1539, 1550, and 1558 nm, respectively. The maximum resonance loss of the CLPFG with a 680-µm period is 23 dB. The CLPFG fabricated in this study is demonstrated for temperature sensing, and the results illustrate that the fabricated CLPFG with a 680-µm period has a temperature sensitivity of 58.4 pm/°C, a wavelength-shifting linearity of R²=0.994, and a 0.856 °C resolution.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chia-Chin Chiang, Hao-Jhen Chang, and Jin-Shun Kuo "Novel fabrication method of corrugated long-period fiber gratings by thick SU-8 photoresist and wet-etching technique," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 033007 (1 July 2010). https://doi.org/10.1117/1.3478238

Published: 1 July 2010

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