Journal of Micro/Nanopatterning, Materials, and Metrology

Editor-in-Chief: Harry Levinson, HJL Lithography, USA

The Journal of Micro/Nanopatterning, Materials, and Metrology (JM³) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry. Formerly the Journal of Micro/Nanolithography, MEMS, and MOEMS, the journal’s key subject areas include the science, development, and practice of lithographic, computational, etch, and integration technologies. In this context the electronics industry includes but is not limited to integrated circuits and multichip modules, and advanced packaging with features in the submicron regime.

On the cover: The figure is from the paper "Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures" by Joost Bekaert et al. from the Special Series on EUV Masks in Vol. 20, Issue 2.

Current Issue All Issues Issues in Progress

EUV-induced hydrogen plasma: pulsed mode operation and confinement in scanner

Mark van de Kerkhof et al.

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Special Series on EUV Masks

Guest Editors: Martin Burkhardt and Vicky Philipsen

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Data augmentation in hotspot detection based on generative adversarial network

Shuhan Wang et al.

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Previously Published Special Sections

from the Journal of Micro/Nanopatterning, Materials, and Metrology

EUV Masks (three-part series, October-December 2020, April-June 2021, July-September 2021)

Guest Editors: Martin Burkhardt and Vicky Philipsen

Control of Integrated Circuit Patterning Variance, Part 4: Placement and Critical Dimension, Edge to Edge Overlay (April-June 2019)

Guest Editor: Alexander Starikov

Challenges and Approaches to EUV-Based Patterning for High-Volume Manufacturing Applications (January-March 2019)

Guest Editors: Sebastian Engelmann, Rich Wise, Roel Gronheid, and Nelson Felix

Control of Integrated Circuit Patterning Variance, Part 3: Pattern Roughness, Local Uniformity, and Stochastic Defects (October-December 2018)

Guest Editors: John C. Robinson, Tim Brunner, Gian Lorusso

Novel Patterning Technologies (July-September 2018)

Guest Editors: Eric Panning and Martha Sanchez

EUV Lithography for the 3-nm Node and Beyond (October-December 2017)

Guest Editors: Vivek Bakshi, Hakaru Mizoguchi, Ted Liang, Andrew Grenville, and Jos Benschop

Alternative Lithographic Technologies V (July-September 2016)

Guest Editors: Chris Bencher and Ricardo Ruiz

Control of Integrated Circuit Patterning Variance, Part 2: Image Placement, Device Overlay, and Critical Dimension (April-June 2016)

Guest Editor: Alexander Starikov

Photomask Manufacturing Technology (April-June 2016)

Guest Editors: Masato Shibuya, Morihisa Hoga, and Kiwamu Takehisa

Extending VLSI and Alternative Technology with Optical and Complementary Lithography (April-June 2016)

Guest Editors: Kafai Lai and Andreas Erdmann

Journal Metrics:
ISSN: 1932-5150
E-ISSN: 2708-8340
CiteScore^TM 2019: 3.0
Impact Factor^*: 1.22
5-Year Impact Factor^*: 0.968
h5-index: 20
^{*Source: Journal Impact Factor^TM, from Clarivate, 2021}

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