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25 April 2017Al0.45Ga0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings
Anna Szerling,1 Renata Kruszka,1 Kamil Kosiel,1 Marek Wzorek,1 Krystyna Gołaszewska,1 Artur Trajnerowicz,1 Piotr Karbownik,1 Maciej Kuc,2 Tomasz G. Czyszanowski,2 Michał J. Walczakowski,3 Norbert Pałka3
1Institute of Electron Technology (Poland) 2Lodz Univ. of Technology (Poland) 3Wojskowa Akademia Techniczna im. Jaroslawa Dabrowskiego (Poland)
Conditions of fabrication of first-order distributed-feedback surface gratings designed for single-mode Al0.45Ga0.55As/GaAs quantum cascades lasers with the emission wavelength of about 10μm are presented. The 1-μm-deep rectangular-shaped gratings with the period of about 1.55μm and duty cycle in the range of 65% to 71% made by the standard photolithography are demonstrated. The wavenumber difference of about 7cm−1 at 77 K is observed for the radiation emitted by lasers fabricated from the same epitaxial structure with ridge widths in the range of 15 to 25μm. Moreover, the emission wavelength of the lasers could be tuned with temperature at a rate of 1nm/K in the temperature range of 77 to 120 K. The full width at half maximum of the emitted spectra is ∼0.4cm−1.
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Anna Szerling, Renata Kruszka, Kamil Kosiel, Marek Wzorek, Krystyna Gołaszewska, Artur Trajnerowicz, Piotr Karbownik, Maciej Kuc, Tomasz G. Czyszanowski, Michał J. Walczakowski, Norbert Pałka, "Al0.45Ga0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings," J. Nanophoton. 11(2) 026004 (25 April 2017) https://doi.org/10.1117/1.JNP.11.026004