Loss analysis in nitride deep ultraviolet planar cavity

Zhongming Zheng; Yingqian Li; Onkundi Paul; Hao Long; Samuel Matta; Mathieu Leroux; Julien Brault; Leiying Ying; Zhiwei Zheng; Baoping Zhang

doi:10.1117/1.JNP.12.043504

18 May 2018 Loss analysis in nitride deep ultraviolet planar cavity

Zhongming Zheng, Yingqian Li, Onkundi Paul, Hao Long, Samuel Matta, Mathieu Leroux, Julien Brault, Leiying Ying, Zhiwei Zheng, Baoping Zhang

Author Affiliations +

Journal of Nanophotonics, Vol. 12, Issue 4, 043504 (May 2018). https://doi.org/10.1117/1.JNP.12.043504

Abstract

In recent decades, literatures about visible vertical cavity surface emitting lasers (VCSELs) have been reported. However, due to high optical loss in the cavity, lasing from deep ultraviolet (DUV) VCSEL was still rarely achieved. The optical loss in nitride DUV microcavity was analyzed in detail. DUV nitride vertical Fabry–Pérot microcavity with active layer of AlGaN-based quantum dots and double-side HfO₂ / SiO₂ distributed bragger reflectors was fabricated. Optical losses with of the order of 10³ cm^− 1 were deduced from the Q value of the cavity modes. The main origination of optical loss in DUV cavity was calculated and ascribed to the interface scattering. The interface roughness appearing after laser lift-off process and overlap between rough interface and standing optical wave were two key parameters that contributed to interface scattering loss. We believe that our results will provide useful information for improving DUV VCSEL devices.

Citation Download Citation

Zhongming Zheng, Yingqian Li, Onkundi Paul, Hao Long, Samuel Matta, Mathieu Leroux, Julien Brault, Leiying Ying, Zhiwei Zheng, and Baoping Zhang "Loss analysis in nitride deep ultraviolet planar cavity," Journal of Nanophotonics 12(4), 043504 (18 May 2018). https://doi.org/10.1117/1.JNP.12.043504

Received: 13 April 2018; Accepted: 3 May 2018; Published: 18 May 2018

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