4 September 2019 Integrated slotted ring resonator at mid-infrared for on-chip sensing applications
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Abstract

We propose various optical ring gas sensors. These gas sensors are promising candidates for integrated on-chip sensing. The sensing operation depends on the change in the effective index. We show a detailed study of different sensors utilizing the absorption wavelength of both methane and carbon dioxide gases. These sensors mainly operate at the range of mid-infrared wavelengths because it contains the vibrational resonance of the gases of interest. We provide the details about the dimensions and the material used in our different structures. Moreover, we report sensitivity up to 5938  nm  /  RIU, and the full-width-half maximum (FWHM) and figure of merit (FoM) for all designs are also calculated. We succeeded in squeezing the FWHM to 4.76 nm and increasing the FoM to 1744.72.

© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 1934-2608/2019/$28.00 © 2019 SPIE
Sarah Shafaay and Mohamed A. Swillam "Integrated slotted ring resonator at mid-infrared for on-chip sensing applications," Journal of Nanophotonics 13(3), 036016 (4 September 2019). https://doi.org/10.1117/1.JNP.13.036016
Received: 9 April 2019; Accepted: 15 August 2019; Published: 4 September 2019
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Gas sensors

Resonators

Methane

Mid-IR

Gases

Waveguides

Refractive index

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