A numerical approach to calculate the power transfer between nanoscale waveguides was proposed. Series of complex power-transfer simulations have been performed when comparing two adjacent waveguides made of different materials. The results showed interesting focusing phenomena when coupling a waveguide sharing a high power confinement factor to a waveguide sharing a low one. In addition, we describe the physical properties of a nanoscale integrable waveguide for smooth integration in the microelectronics industry and analyze two case studies regarding such a possible integration. It seems that due to the lack of ability to confine the mode inside a nanoscale dimensions waveguide, combining waveguides with current size transistor may be, at this stage, difficult to realize without specific fits of the whole module.