Schottky barrier photodetector (PD) (tungsten/nickel/aluminum nitride) based on stacked tungsten gratings is reported in our work. The absorbance of the grating-based structure is obtained using rigorous coupled-wave analysis method. In addition, a responsivity value of 6.164 mA / W is calculated at λ = 559.38 nm based on Fowler’s model. More than three times enhancement in responsivity is achieved as compared with that of bulk structure (without grating) based Schottky barrier PD. In addition, a detectivity value of 33.11 × 1011 cm Hz1/2 / W is obtained. Furthermore, the effect of grating variables and incident angle on responsivity are also demonstrated. In future, the proposed structure can also be used as a plasmonic sensor, absorber, or spectral filter.
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