Review of structured thin films in wide bandgap semiconductors: pendeo-epitaxy of GaN and AlGaN

Thomas Gehrke

doi:10.1117/1.3054137

1 December 2008 Review of structured thin films in wide bandgap semiconductors: pendeo-epitaxy of GaN and AlGaN

Thomas Gehrke

Author Affiliations +

Journal of Nanophotonics, Vol. 2, Issue 1, 021990 (December 2008). https://doi.org/10.1117/1.3054137

Abstract

Structured wide bandgap semiconductor thin films have been developed as a technique for growing thin films with low threading dislocation densities. A growth technique called Pendeo-Epitaxy (PE) has been applied to the deposition of GaN and AlGaN thin films. Low densities of dislocations on GaN stripes on AlN/6H-SiC(0001) and AlN/3C-SiC(111)/Si(111) substrates have been achieved. The dislocation density was reduced by at least five orders of magnitude. The characterization of the resulting materials is being reported in this paper. By using a mask on the [100]-direction oriented GaN stripes, the vertical propagation of threading dislocations during PE regrowth is blocked. Tilting in the laterally moving growth fronts, and associated crystallographic misregistry in the areas of coalescence over the stripes, and the generation of dislocations propagating from the resulting boundaries has been observed. A potential solution to this problem has been developed and is based on the elimination of the mask, as determined via X-ray diffraction and scanning and transmission electron microscopies.

Citation Download Citation

Thomas Gehrke "Review of structured thin films in wide bandgap semiconductors: pendeo-epitaxy of GaN and AlGaN," Journal of Nanophotonics 2(1), 021990 (1 December 2008). https://doi.org/10.1117/1.3054137

Published: 1 December 2008

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available