Comparison Of Two Common Methods Of Surface Topography Evaluation

Allen L. Gauler

doi:10.1117/12.7973021

1 December 1982 Comparison Of Two Common Methods Of Surface Topography Evaluation

Allen L. Gauler

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Optical Engineering, Vol. 21, Issue 6, 216991 (December 1982). https://doi.org/10.1117/12.7973021

Abstract

This paper compares some of the advantages and limitations of two methods used for surface topography evaluation, the dual-beam interference microscope and the stylus-type profiling instrument. Consideration is primarily limited to diamond-machined or other high quality surfaces, such as those commonly encountered on optical elements. Parameters discussed include horizontal and vertical resolution, horizontal and vertical range, and surface damage.

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Allen L. Gauler "Comparison Of Two Common Methods Of Surface Topography Evaluation," Optical Engineering 21(6), 216991 (1 December 1982). https://doi.org/10.1117/12.7973021

Published: 1 December 1982

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