Optical Engineering
VOL. 22 · NO. 2 | April 1983
CONTENTS
IN THIS ISSUE

Journal Articles
Opt. Eng. 22(2), 222175 (1 April 1983) https://doi.org/10.1117/12.7973076
TOPICS: Lithography, Submicron lithography, Semiconductors, Optical lithography, Integrated circuits, Optical design, Optical engineering, Metals, Oxides, Molybdenum
Opt. Eng. 22(2), 222176 (1 April 1983) https://doi.org/10.1117/12.7973077
TOPICS: Submicron lithography, Metals, Oxides, Semiconductors, Integrated circuits, Lithography, Molybdenum, Resistance, Capacitance
Opt. Eng. 22(2), 222181 (1 April 1983) https://doi.org/10.1117/12.7973078
TOPICS: Polymers, Lithography, Polymethylmethacrylate, X-ray optics, Submicron lithography, Thermography, Ions, X-rays, Plasma
Opt. Eng. 22(2), 222185 (1 April 1983) https://doi.org/10.1117/12.7973079
TOPICS: Photoresist processing, Metals, Oxides, Semiconductors, Electron beam lithography, Lithography, Photoresist materials, CMOS technology, Americium
Opt. Eng. 22(2), 222190 (1 April 1983) https://doi.org/10.1117/12.7973080
TOPICS: Beam shaping, Integrated circuits, Lithography
Opt. Eng. 22(2), 222195 (1 April 1983) https://doi.org/10.1117/12.7973081
TOPICS: Electron beam lithography, Monte Carlo methods, Electron beams, Polymers, Computer simulations, Space reconnaissance, Lithography, Laser scattering, Scattering
Opt. Eng. 22(2), 222199 (1 April 1983) https://doi.org/10.1117/12.7973082
TOPICS: Metals, Oxides, X-ray lithography, Semiconductors, X-rays, Silicon, Palladium, Lanthanum, Integrated circuits, Optical lithography
Opt. Eng. 22(2), 222203 (1 April 1983) https://doi.org/10.1117/12.7973083
TOPICS: Zone plates, Optical alignment, X-ray lithography, Photomasks, Semiconducting wafers, Automatic alignment, Signal to noise ratio, Optical lithography, Image processing, Process control
Opt. Eng. 22(2), 222208 (1 April 1983) https://doi.org/10.1117/12.7973084
TOPICS: Ion beam lithography, Photomasks, Collimation, Semiconducting wafers, Lithography, Metals, Oxides, Semiconductors, Mask making, Photoresist processing
Opt. Eng. 22(2), 222215 (1 April 1983) https://doi.org/10.1117/12.7973085
TOPICS: Ion beam lithography, Gaussian beams, Monte Carlo methods, Polymethylmethacrylate, Silicon, Ions
Opt. Eng. 22(2), 222220 (1 April 1983) https://doi.org/10.1117/12.7973086
TOPICS: Vacuum ultraviolet, Diffraction gratings, Electromagnetic theory, Signal attenuation
Opt. Eng. 22(2), 222224 (1 April 1983) https://doi.org/10.1117/12.7973087
TOPICS: Telescopes, Velocity measurements, Speckle interferometry, Spectroscopy, Photons, Turbulence, Objectives, Imaging spectroscopy, Astronomy, Prototyping
Opt. Eng. 22(2), 222227 (1 April 1983) https://doi.org/10.1117/12.7973088
TOPICS: Refractive index, Liquids, Glasses, Light, Helium neon lasers, Solids
Opt. Eng. 22(2), 222231 (1 April 1983) https://doi.org/10.1117/12.7973089
TOPICS: Mirrors, Spherical lenses
Opt. Eng. 22(2), 222236 (1 April 1983) https://doi.org/10.1117/12.7973090
TOPICS: Mirrors, Telescopes, Polishing, Optical telescopes, Materials processing, Process control, Surface finishing
Opt. Eng. 22(2), 222241 (1 April 1983) https://doi.org/10.1117/12.7973091
TOPICS: X-rays, Spectroscopy, Spectral resolution, Americium, Plasmas, Spatial resolution, Gold, Streak cameras, Image resolution, X-ray imaging
Opt. Eng. 22(2), 222247 (1 April 1983) https://doi.org/10.1117/12.7973092
TOPICS: Semiconductor lasers, Laser communications, Transmitters
Opt. Eng. 22(2), 222256 (1 April 1983) https://doi.org/10.1117/12.7973093
TOPICS: Image quality, Imaging devices
Opt. Eng. 22(2), 222260 (1 April 1983) https://doi.org/10.1117/12.7973094
TOPICS: Image processing, Space operations, Multispectral imaging, Imaging systems, Intelligence systems, Intelligent sensors, Intelligent sensor systems, Sensors, Data processing
Opt. Eng. 22(2), 222267 (1 April 1983) https://doi.org/10.1117/12.7973095
TOPICS: Infrared cameras, Astronomy, Space telescopes, Infrared imaging, Photometry, Bismuth, Silicon, Sensors, Telescopes, Space operations
Opt. Eng. 22(2), 222269 (1 April 1983) https://doi.org/10.1117/12.7973096
TOPICS: Composites, Sensors, Brain mapping, Target detection, Brain
Opt. Eng. 22(2), 222275 (1 April 1983) https://doi.org/10.1117/12.7973097
TOPICS: Fourier optics, Sensors, Diffraction
Opt. Eng. 22(2), 222276 (1 April 1983) https://doi.org/10.1117/12.7973098
TOPICS: Calibration, Interferometers, Mirrors, Eye, Automatic tracking, Aspheric lenses, Optical components, Prototyping, Retroreflectors, Sensors
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