Optical Engineering
VOL. 26 · NO. 4 | April 1987
CONTENTS
IN THIS ISSUE

Journal Articles
Opt. Eng. 26(4), 264293 (1 April 1987) https://doi.org/10.1117/12.7974068
TOPICS: Optical lithography, Lithography, X-ray lithography, Optical design, Optical engineering, Submicron lithography, X-ray optics, X-rays, Ion beams, Lenses
Opt. Eng. 26(4), 264294 (1 April 1987) https://doi.org/10.1117/12.7974069
TOPICS: Optical lithography, Optics manufacturing, Lenses, Diffraction
Opt. Eng. 26(4), 264300 (1 April 1987) https://doi.org/10.1117/12.7974070
TOPICS: Optical lithography, Imaging systems, Collimation, Space telescopes, Telescopes
Opt. Eng. 26(4), 264304 (1 April 1987) https://doi.org/10.1117/12.7974071
TOPICS: Optical lithography, Deep ultraviolet, Excimer lasers, Photoresist materials, Photoresist processing, Manufacturing, Speckle, Polymethylmethacrylate, Absorption
Opt. Eng. 26(4), 264311 (1 April 1987) https://doi.org/10.1117/12.7974072
TOPICS: Lithography, Excimer lasers, Deep ultraviolet, Semiconducting wafers, Very large scale integration, Laser development, Silica, Projection systems
Opt. Eng. 26(4), 264319 (1 April 1987) https://doi.org/10.1117/12.7974073
TOPICS: Optical lithography, Computer simulations, Near ultraviolet, Deep ultraviolet, Control systems
Opt. Eng. 26(4), 264325 (1 April 1987) https://doi.org/10.1117/12.7974074
TOPICS: Mask making, Optical lithography, Photomasks, Lithography, Pixel resolution, Tolerancing, Beam shaping
Opt. Eng. 26(4), 264330 (1 April 1987) https://doi.org/10.1117/12.7974075
TOPICS: Optical lithography, Photoresist materials, Image processing, Optical imaging, Photoresist developing, Deep ultraviolet, Multilayers, Antireflective coatings
Opt. Eng. 26(4), 264337 (1 April 1987) https://doi.org/10.1117/12.7974076
TOPICS: Infrared photography, Photography, Infrared radiation, Thermal modeling, Statistical analysis, Silver
Opt. Eng. 26(4), 264342 (1 April 1987) https://doi.org/10.1117/12.7974077
TOPICS: Reflectivity, Infrared radiation, Absorption, Radiative transfer
Opt. Eng. 26(4), 264349 (1 April 1987) https://doi.org/10.1117/12.7974078
TOPICS: Broadband telecommunications, Optical fibers, Channel projecting optics, Laser optics, Tunable lasers, Heterodyning, Receivers
Opt. Eng. 26(4), 264354 (1 April 1987) https://doi.org/10.1117/12.7974079
TOPICS: Computing systems, Data processing, Image processing, Image analysis
Opt. Eng. 26(4), 264359 (1 April 1987) https://doi.org/10.1117/12.7974080
TOPICS: Holographic interferometry, Holography, Lenses, Interferometry, Interferometers
Opt. Eng. 26(4), 264365 (1 April 1987) https://doi.org/10.1117/12.7974081
TOPICS: Monochromatic aberrations
Opt. Eng. 26(4), 264366 (1 April 1987) https://doi.org/10.1117/12.7974067
Opt. Eng. 26(4), 264367 (1 April 1987) https://doi.org/10.1117/12.7974082
TOPICS: Integrated optics, Fiber optics, Electromagnetic theory, Microwave radiation, Dielectrics, Waveguides, Electromagnetic scattering, Scattering, Prisms, Electrooptic modulators
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