1 January 1992 Packaging of glass waveguide silicon devices
Herman M. Presby, Christopher A. Edwards
Author Affiliations +
Abstract
We demonstrate a technique that makes possible the robust packaging and interconnection of fiber pigtails to glass waveguide silicon devices. An integrated 19 x 19 star coupler, formed on a silicon substrate, is covered with a silica slab attached by means of a low-index epoxy. The slab both isolates the waveguides, which are just a few micrometers below the surface, from their surroundings and provides a means for attaching fiber connectors. Measurements of the performance of the star coupler before and after covering even show a slight (<0.5 dB) improvement for many of the waveguides due to the silica cover.
Herman M. Presby and Christopher A. Edwards "Packaging of glass waveguide silicon devices," Optical Engineering 31(1), (1 January 1992). https://doi.org/10.1117/12.56043
Published: 1 January 1992
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CITATIONS
Cited by 12 scholarly publications.
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KEYWORDS
Waveguides

Stars

Silicon

Epoxies

Silica

Cladding

Packaging

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