Diffraction properties of a 0.24-um period multilayer laminar amplitude grating in the soft x-ray region

H. Berrouane; Chantal G. Khan Malek; Jean-Michel Andre; F. R. Ladan; Jean-Rene Rivoira; Robert J. Barchewitz

doi:10.1117/12.56082

1 February 1992 Diffraction properties of a 0.24-μm period multilayer laminar amplitude grating in the soft x-ray region

H. Berrouane, Chantal G. Khan Malek, Jean-Michel Andre, F. R. Ladan, Jean-Rene Rivoira, Robert J. Barchewitz

Author Affiliations +

Optical Engineering, Vol. 31, Issue 2, (February 1992). https://doi.org/10.1117/12.56082

Abstract

We report on the fabrication of a laminar multilayer amplitude grating, characterization in the soft x-ray region, and modeling of its properties. Holographic lithography was used to produce a 0.24-μm spatial period grating on a triode sputtered Mo/C multilayer mirror. The pattern was transferred into the multilayer mirror by reactive ion etching in an SF₆ plasma after an intermediate lift-off step. The position and relative efficiency of the different orders of a grating etched down to the silicon substrate were measured at the Cu L_αβ line (1.33 nm). The results were interpreted in the framework of a scalar kinematic diffraction theory.

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H. Berrouane, Chantal G. Khan Malek, Jean-Michel Andre, F. R. Ladan, Jean-Rene Rivoira, and Robert J. Barchewitz "Diffraction properties of a 0.24-μm period multilayer laminar amplitude grating in the soft x-ray region," Optical Engineering 31(2), (1 February 1992). https://doi.org/10.1117/12.56082

Published: 1 February 1992

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