Birefringent common-path interferometer for testing large convex spherical surfaces

Xu Xiang Yang; Caixin Xiang; Guodong Zhang

doi:10.1117/12.133348

1 May 1993 Birefringent common-path interferometer for testing large convex spherical surfaces

Xu Xiang Yang, Caixin Xiang, Guodong Zhang

Author Affiliations +

Optical Engineering, Vol. 32, Issue 5, (May 1993). https://doi.org/10.1117/12.133348

Abstract

A new birefringent common-path interterometer with an automatic data-processing system is presented fortesting large convex spherical surfaces. With this interferometer, it is easier to eliminate system errors and to achieve quite accurate measurement. The precision of the system is about λ/50 with an accuracy of about λ/10.

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Xu Xiang Yang, Caixin Xiang, and Guodong Zhang "Birefringent common-path interferometer for testing large convex spherical surfaces," Optical Engineering 32(5), (1 May 1993). https://doi.org/10.1117/12.133348

Published: 1 May 1993

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