optical engineering
VOL. 32 · NO. 10 | October 1993
CONTENTS
IN THIS ISSUE

Articles (46)
Articles (2)
Articles
Brian Thompson
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.162624
TOPICS: Optical engineering, Physics, Roads, Photography, Optics, Ocean optics, Electro optics, Atmospheric physics, Atmospheric sensing, Remote sensing
James Sheats
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.162626
TOPICS: Optical lithography, Chemistry, Excimer lasers, Laser processing, Polymer thin films, Optics manufacturing, Lithography, Polymers, Thin films, Roads
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.147129
TOPICS: Phase shifts, Reticles, Photomasks, Quartz, Lithography, Manufacturing, Chemical vapor deposition, Scanning electron microscopy, Photoresist processing, Semiconducting wafers
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145956
TOPICS: Photomasks, Computer aided design, Spatial frequencies, Lithographic illumination, Lithography, Manufacturing, Image acquisition, Phase shifts, Photoresist processing, Optical lithography
Souichi Katagiri, Shigeo Moriyama, Tsuneo Terasawa
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145957
TOPICS: Optical alignment, Semiconducting wafers, Wafer-level optics, Sensors, Lithography, Signal detection, Signal to noise ratio, Monochromatic aberrations, Heterodyning, Prisms
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146837
TOPICS: Photoresist materials, Photomasks, Lithography, Optical lithography, Image processing, Image quality, Photoresist developing, Semiconducting wafers, Spatial filters, Image filtering
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145955
TOPICS: Lithography, Deep ultraviolet, Absorption, Prototyping, Chemically amplified resists, Optical lithography, Photoresist materials, Printing, Absorbance, Laser development
Takashi Hattori, Leo Schlegel, Akira Imai, Nobuaki Hayashi, Takumi Ueno
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145971
TOPICS: Deep ultraviolet, Chlorine, Lithography, Infrared spectroscopy, Excimer lasers, Absorbance, Absorption, Ultraviolet radiation, Scanning electron microscopy, Optical lithography
Edward Pavelchek, Gary Calabrese, John Bohland, Bruce Dudley, Susan Jones, Peter Freeman
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146858
TOPICS: Silicon, Semiconducting wafers, Photoresist processing, Scanning electron microscopy, Reactive ion etching, Etching, Deep ultraviolet, Image processing, Glasses, Manufacturing
Mark Hartney, Roderick Kunz, Lynn Eriksen, Douglas LaTulipe
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146843
TOPICS: Silicon, Liquids, Photoresist processing, Lithography, Semiconducting wafers, Chemical analysis, Diffusion, Signal processing, Silicon films, Chlorine
Mark Horn, Mark Hartney, Roderick Kunz
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146847
TOPICS: Etching, Reactive ion etching, Semiconducting wafers, Silicon, Ions, Photoresist processing, Plasma, Microwave radiation, Photomasks, Scanning electron microscopy
John Hutchinson, Siddhartha Das, Qi-De Qian, Henry Gaw
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145968
TOPICS: Deep ultraviolet, Data modeling, Signal processing, Semiconducting wafers, Process modeling, Photoresist processing, Picture Archiving and Communication System, Lithography, In situ metrology, Systems modeling
Francis Clube, Simon Gray, Denis Struchen, Jean-Claude Tisserand
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145967
TOPICS: Holography, Photomasks, Optical alignment, Semiconducting wafers, Holograms, Lithography, Imaging systems, Photoresist materials, Prisms, Optics manufacturing
Uday Sengupta
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145969
TOPICS: Excimer lasers, Fabry–Perot interferometers, Lithography, Excimers, Krypton, Lamps, Electrodes, Fluorine, Fringe analysis, Deep ultraviolet
Harvey Phillips, Roland Sauerbrey
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.155267
TOPICS: Excimer lasers, Spatial resolution, Polymers, Visibility, Laser ablation, Nanostructures, Femtosecond phenomena, Quartz, Photomicroscopy, Atomic force microscopy
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146857
TOPICS: Metals, X-ray lithography, X-rays, Silicon, Polymethylmethacrylate, Electroluminescence, Semiconducting wafers, Image processing, Chemistry, Halogens
Gerry Owen
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146859
TOPICS: Lithography, Modulation transfer functions, Photoresist materials, Electron beam lithography, Backscatter, Fourier transforms, Point spread functions, Computer simulations, Scattering, Photoresist developing
Elizabeth Dobisz, Christie Marrian, R. Salvino, Mario Ancona, Kee Rhee, Martin Peckerar
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145970
TOPICS: Silicon, Electrons, Silicon films, Lithography, Electron beam lithography, Tungsten, Resolution enhancement technologies, Monte Carlo methods, Field effect transistors, X-rays
Tivadar Lippenyi, Zoltan Fuezessy
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.163162
TOPICS: Optical engineering, Physics, Holography, Laser development, Holographic interferometry, Mathematics, Photography, Applied research, Nonlinear optics, Photoelectric effect
Jozsef Bakos, Zsuzsa Sorlei
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145311
TOPICS: Far infrared lasers, Carbon dioxide lasers, Gases, Signal detection, Mirrors, Laser stabilization, Sensors, Tunable lasers, Laser resonators, Optical pumping
Sergei Kukhlevsky, Ida Kozma
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145284
TOPICS: Waveguides, Resonators, Laser resonators, Pulsed laser operation, Spatial coherence, Waveguide lasers, Mirrors, Plasma, Aluminum, Quartz
Gyozo Farkas, Csaba Toth
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145285
TOPICS: Metals, Electron beams, Pulsed laser operation, Polarization, Photoelectric effect, Excimer lasers, Gold, Ultrafast phenomena, Electroluminescence, Picosecond phenomena
Gyozo Farkas, Csaba Toth, Ambrus Kohazi-Kis
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145288
TOPICS: Acquisition tracking and pointing, Gold, Metals, Photoelectric effect, Pulsed laser operation, Multiphoton processes, Laser stabilization, Electrodes, Neodymium glass lasers, Ionization
Zsolt Bor, Bela Hopp, Bela Racz, Gabor Szabo, Zsuzsanna Marton, Imola Ratkay, Judit Mohay, Ildiko Sueveges, Agnes Fuest
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145357
TOPICS: Laser ablation, Cornea, Excimer lasers, Eye, Etching, Photography, Wave propagation, Spatial resolution, Dye lasers, In vitro testing
Jozsef Bakos, Peter Ignacz, Miklos Kedves, Janos Szigeti
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145398
TOPICS: Ions, Sodium, Plasma, Ionization, Excimer lasers, Laser ablation, Silicon, Ionization spectroscopy, Spectroscopy, Mass spectrometry
Zoltan Horvath, Zsolt Benko, Attila Kovacs, H. Hazim, Zsolt Bor
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145386
TOPICS: Ultrafast phenomena, Wave propagation, Femtosecond phenomena, Diffraction, Gaussian beams, Diffraction gratings, Far-field diffraction, Light wave propagation, Distortion, Geometrical optics
Zsolt Bor, Bela Racz, Gabor Szabo, Margit Hilbert, H. Hazim
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145393
TOPICS: Dispersion, Prisms, Femtosecond phenomena, Phase velocity, Beam propagation method, Diffraction gratings, Interferometers, Diffraction, Refractive index, Monochromators
Peter Kallo, Gabor Kovacs
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145376
TOPICS: Lens design, Chromatic aberrations, Acquisition tracking and pointing, Modulation transfer functions, Image processing, Refractive index, Monochromatic aberrations, Digital image processing, Objectives, Optical design
Gabor Szarvas, Miklos Barabas, Peter Richter, Laszlo Jakab
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145291
TOPICS: Waveguides, Point spread functions, Lens design, Planar waveguides, Refractive index, Geometrical optics, Wave propagation, Diffraction, Refraction, Anisotropy
Miklos Racz, Istvan Reti, Sandor Ferenczi
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145396
TOPICS: Optical filters, Sensors, Glasses, Radiometry, Lamps, Mercury, Interference filters, Solids, Calibration, Ultraviolet radiation
Janos Balazs, I. Giczi, M. Lengyel
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145399
TOPICS: Computer aided design, Waveguides, Near field optics, Near field, Finite element methods, Refractive index, Semiconductors, Beam propagation method, Image processing, Software development
Karpat Ferencz, Robert Szipocs
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145356
TOPICS: Mirrors, Absorption, Reflectivity, Refractive index, Optical coatings, Scattering, Laser development, Reflectors, Laser optics, Coating
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145375
TOPICS: Holograms, 3D image reconstruction, Holography, Silver, Modulation transfer functions, Diffraction, Image quality, Spatial resolution, Image resolution, Amplitude modulation
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145378
TOPICS: Holographic interferometry, Holography, Refractive index, Ray tracing, Interferometry, Visibility, 3D image reconstruction, Spatial frequencies, Moire patterns, Beam splitters
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145394
TOPICS: Particles, Atmospheric particles, Light scattering, Calibration, Photomultipliers, Aerodynamics, Aerosols, Laser resonators, Optical filters, Latex
Gyorgy Abraham, Klara Wenzel, Attila Halmai, Akos Antal, Laszlo Molnar
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145395
TOPICS: Mirrors, Interferometers, Beam splitters, Diamond turning, Theory of relativity, Video, Precision mechanics, Precision optics, Light, Diamond
Attila Barocsi, Laszlo Jakab, Peter Richter, Christian Schroedter, Christoph Hagedorn
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145313
TOPICS: Acousto-optics, Optical filters, Spectroscopy, Adaptive optics, Tunable filters, Diffraction, Acoustics, Solids, Multilayers, Bandpass filters
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145359
TOPICS: Signal detection, Sensors, Interferometers, Heterodyning, Signal processing, Data acquisition, Motion analysis, Analog electronics, Resolution enhancement technologies, Motion measurement
Istvan Reti, I. Giczi, Kathleen Muray
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145362
TOPICS: Optical filters, CCD cameras, Image filtering, Sensors, CCD image sensors, Colorimetry, Glasses, Image quality, Charge-coupled devices, Image sensors
Tibor Berceli, Ferenc Mernyei
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145397
TOPICS: Modulation, Transmitters, Semiconductor lasers, Transmittance, Intermodulation, Microwave radiation, Multiplexing, Televisions, Active optics, Nonlinear optics
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146386
TOPICS: Holograms, Holography, 3D image processing, Cameras, Laser induced fluorescence, Image processing, 3D image reconstruction, Photography, Light, Laser systems engineering
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146390
TOPICS: Holograms, Holography, Latex, Holographic interferometry, Electron microscopes, 3D image reconstruction, Wavefronts, Interferometers, Photography, Optical benches
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146388
TOPICS: Sensors, Point spread functions, Image sensors, Atmospheric sensing, Signal detection, Imaging systems, Infrared sensors, Image transmission, Infrared imaging, Signal attenuation
Rupert Young, Christopher Chatwin, Brian Scott
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146387
TOPICS: Spatial light modulators, Holograms, Video, Volume holography, Optical correlators, Charge-coupled devices, 3D image reconstruction, Fourier transforms, Multiplexing, Modulation
David Vernon
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146389
TOPICS: Hough transforms, Image segmentation, Tolerancing, Image filtering, Image processing, Spatial filters, Chemical elements, Image resolution, Skin, Binary data
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