Optical Engineering
VOL. 32 · NO. 10 | October 1993
CONTENTS
IN THIS ISSUE

Articles (48)
Articles
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.162624
TOPICS: Optical engineering, Physics, Roads, Photography, Optics, Ocean optics, Electro optics, Atmospheric physics, Atmospheric sensing, Remote sensing
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.162626
TOPICS: Optical lithography, Chemistry, Excimer lasers, Laser processing, Polymer thin films, Optics manufacturing, Lithography, Polymers, Thin films, Roads
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.147129
TOPICS: Phase shifts, Reticles, Photomasks, Quartz, Lithography, Manufacturing, Chemical vapor deposition, Scanning electron microscopy, Photoresist processing, Semiconducting wafers
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145956
TOPICS: Photomasks, Computer aided design, Spatial frequencies, Lithographic illumination, Lithography, Manufacturing, Image acquisition, Phase shifts, Photoresist processing, Optical lithography
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145957
TOPICS: Optical alignment, Semiconducting wafers, Wafer-level optics, Sensors, Lithography, Signal detection, Signal to noise ratio, Monochromatic aberrations, Heterodyning, Prisms
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146837
TOPICS: Photoresist materials, Photomasks, Lithography, Optical lithography, Image processing, Image quality, Photoresist developing, Semiconducting wafers, Spatial filters, Image filtering
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145955
TOPICS: Lithography, Deep ultraviolet, Absorption, Prototyping, Chemically amplified resists, Optical lithography, Photoresist materials, Printing, Absorbance, Laser development
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145971
TOPICS: Deep ultraviolet, Chlorine, Lithography, Infrared spectroscopy, Excimer lasers, Absorbance, Absorption, Ultraviolet radiation, Scanning electron microscopy, Optical lithography
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146858
TOPICS: Silicon, Semiconducting wafers, Photoresist processing, Scanning electron microscopy, Reactive ion etching, Etching, Deep ultraviolet, Image processing, Glasses, Manufacturing
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146843
TOPICS: Silicon, Liquids, Photoresist processing, Lithography, Semiconducting wafers, Chemical analysis, Diffusion, Signal processing, Silicon films, Chlorine
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146847
TOPICS: Etching, Reactive ion etching, Semiconducting wafers, Silicon, Ions, Photoresist processing, Plasma, Microwave radiation, Photomasks, Scanning electron microscopy
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145968
TOPICS: Deep ultraviolet, Data modeling, Signal processing, Semiconducting wafers, Process modeling, Photoresist processing, Picture Archiving and Communication System, Lithography, In situ metrology, Systems modeling
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145967
TOPICS: Holography, Photomasks, Optical alignment, Semiconducting wafers, Holograms, Lithography, Imaging systems, Photoresist materials, Prisms, Optics manufacturing
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145969
TOPICS: Excimer lasers, Fabry–Perot interferometers, Lithography, Excimers, Krypton, Lamps, Electrodes, Fluorine, Fringe analysis, Deep ultraviolet
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146852
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.155267
TOPICS: Excimer lasers, Spatial resolution, Polymers, Visibility, Laser ablation, Nanostructures, Femtosecond phenomena, Quartz, Photomicroscopy, Atomic force microscopy
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146857
TOPICS: Metals, X-ray lithography, X-rays, Silicon, Polymethylmethacrylate, Electroluminescence, Semiconducting wafers, Image processing, Chemistry, Halogens
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146859
TOPICS: Lithography, Modulation transfer functions, Photoresist materials, Electron beam lithography, Backscatter, Fourier transforms, Point spread functions, Computer simulations, Scattering, Photoresist developing
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145970
TOPICS: Silicon, Electrons, Silicon films, Lithography, Electron beam lithography, Tungsten, Resolution enhancement technologies, Monte Carlo methods, Field effect transistors, X-rays
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.163162
TOPICS: Optical engineering, Physics, Holography, Laser development, Holographic interferometry, Mathematics, Photography, Applied research, Nonlinear optics, Photoelectric effect
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145311
TOPICS: Far infrared lasers, Carbon dioxide lasers, Gases, Signal detection, Mirrors, Laser stabilization, Sensors, Tunable lasers, Laser resonators, Optical pumping
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145284
TOPICS: Waveguides, Resonators, Laser resonators, Pulsed laser operation, Spatial coherence, Waveguide lasers, Mirrors, Plasma, Aluminum, Quartz
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145285
TOPICS: Metals, Electron beams, Pulsed laser operation, Polarization, Photoelectric effect, Excimer lasers, Gold, Ultrafast phenomena, Electroluminescence, Picosecond phenomena
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145288
TOPICS: Acquisition tracking and pointing, Gold, Metals, Photoelectric effect, Pulsed laser operation, Multiphoton processes, Laser stabilization, Electrodes, Neodymium glass lasers, Ionization
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145357
TOPICS: Laser ablation, Cornea, Excimer lasers, Eye, Etching, Photography, Wave propagation, Spatial resolution, Dye lasers, In vitro testing
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145398
TOPICS: Ions, Sodium, Plasma, Ionization, Excimer lasers, Laser ablation, Silicon, Ionization spectroscopy, Spectroscopy, Mass spectrometry
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145386
TOPICS: Ultrafast phenomena, Wave propagation, Femtosecond phenomena, Diffraction, Gaussian beams, Diffraction gratings, Far-field diffraction, Light wave propagation, Distortion, Geometrical optics
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145393
TOPICS: Dispersion, Prisms, Femtosecond phenomena, Phase velocity, Beam propagation method, Diffraction gratings, Interferometers, Diffraction, Refractive index, Monochromators
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145376
TOPICS: Lens design, Chromatic aberrations, Acquisition tracking and pointing, Modulation transfer functions, Image processing, Refractive index, Monochromatic aberrations, Digital image processing, Objectives, Optical design
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145291
TOPICS: Waveguides, Point spread functions, Lens design, Planar waveguides, Refractive index, Geometrical optics, Wave propagation, Diffraction, Refraction, Anisotropy
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145396
TOPICS: Optical filters, Sensors, Glasses, Radiometry, Lamps, Mercury, Interference filters, Solids, Calibration, Ultraviolet radiation
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145399
TOPICS: Computer aided design, Waveguides, Near field optics, Near field, Finite element methods, Refractive index, Semiconductors, Beam propagation method, Image processing, Software development
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145356
TOPICS: Mirrors, Absorption, Reflectivity, Refractive index, Optical coatings, Scattering, Laser development, Reflectors, Laser optics, Coating
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145375
TOPICS: Holograms, 3D image reconstruction, Holography, Silver, Modulation transfer functions, Diffraction, Image quality, Spatial resolution, Image resolution, Amplitude modulation
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145378
TOPICS: Holographic interferometry, Holography, Refractive index, Ray tracing, Interferometry, Visibility, 3D image reconstruction, Spatial frequencies, Moire patterns, Beam splitters
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145394
TOPICS: Particles, Atmospheric particles, Light scattering, Calibration, Photomultipliers, Aerodynamics, Aerosols, Laser resonators, Optical filters, Latex
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145395
TOPICS: Mirrors, Interferometers, Beam splitters, Diamond turning, Theory of relativity, Video, Precision mechanics, Precision optics, Light, Diamond
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145313
TOPICS: Acousto-optics, Optical filters, Spectroscopy, Adaptive optics, Tunable filters, Diffraction, Acoustics, Solids, Multilayers, Bandpass filters
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145359
TOPICS: Signal detection, Sensors, Interferometers, Heterodyning, Signal processing, Data acquisition, Motion analysis, Analog electronics, Resolution enhancement technologies, Motion measurement
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145362
TOPICS: Optical filters, CCD cameras, Image filtering, Sensors, CCD image sensors, Colorimetry, Glasses, Image quality, Charge-coupled devices, Image sensors
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.145397
TOPICS: Modulation, Transmitters, Semiconductor lasers, Transmittance, Intermodulation, Microwave radiation, Multiplexing, Televisions, Active optics, Nonlinear optics
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146386
TOPICS: Holograms, Holography, 3D image processing, Cameras, Laser induced fluorescence, Image processing, 3D image reconstruction, Photography, Light, Laser systems engineering
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146390
TOPICS: Holograms, Holography, Latex, Holographic interferometry, Electron microscopes, 3D image reconstruction, Wavefronts, Interferometers, Photography, Optical benches
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146388
TOPICS: Sensors, Point spread functions, Image sensors, Atmospheric sensing, Signal detection, Imaging systems, Infrared sensors, Image transmission, Infrared imaging, Signal attenuation
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146387
TOPICS: Spatial light modulators, Holograms, Video, Volume holography, Optical correlators, Charge-coupled devices, 3D image reconstruction, Fourier transforms, Multiplexing, Modulation
Opt. Eng. 32(10), (1 October 1993) https://doi.org/10.1117/12.146389
TOPICS: Hough transforms, Image segmentation, Tolerancing, Image filtering, Image processing, Spatial filters, Chemical elements, Image resolution, Skin, Binary data
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