Sensitivity enhancement of an electro-optic sensor for displacement measurement

Lakhan Singh Tanwar; Baij Nath Gupta; S. C. Bansal

doi:10.1117/12.168252

1 June 1994 Sensitivity enhancement of an electro-optic sensor for displacement measurement

Lakhan Singh Tanwar, Baij Nath Gupta, S. C. Bansal

Author Affiliations +

Optical Engineering, Vol. 33, Issue 6, (June 1994). https://doi.org/10.1117/12.168252

Abstract

Current high-technology precision engineering sensors with submicrometer and even nanometer resolutions have become a necessity. Among the various types of noncontact high-resolution sensors, noninterferometric electro-optical (EO) sensors have their built-in preferential features. Earlier, we developed a triangulation principle based noncontact EO sensor with 0.01-μm resolution. By optimizing the design parameters of this EO sensor, the resolution has been enhanced by almost an order of magnitude. A piezoelectric transducer (PZT) mirror with 3 μm/kV excitation voltage has been used as the target surface. The details of experimental setup and the results arrived at are presented.

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Lakhan Singh Tanwar, Baij Nath Gupta, and S. C. Bansal "Sensitivity enhancement of an electro-optic sensor for displacement measurement," Optical Engineering 33(6), (1 June 1994). https://doi.org/10.1117/12.168252

Published: 1 June 1994

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