Microfabricated optical chopper

Michael T. Ching; Reid A. Brennen; Richard M. White

doi:10.1117/12.181576

1 November 1994 Microfabricated optical chopper

Michael T. Ching, Reid A. Brennen, Richard M. White

Author Affiliations +

Optical Engineering, Vol. 33, Issue 11, (November 1994). https://doi.org/10.1117/12.181576

Abstract

A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electrostatically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable deflection amplitudes of 400 μm. Further optimizations of the design are discussed.

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Michael T. Ching, Reid A. Brennen, and Richard M. White "Microfabricated optical chopper," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.181576

Published: 1 November 1994

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