Application of diamond-like carbon film as protection and  antireflection coatings of ZnS elements

Guifeng Zhang; L. J. Guo; Zhengtang Liu; Xiulin Zheng

doi:10.1117/12.163158

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1 April 1994 Application of diamond-like carbon film as protection and antireflection coatings of ZnS elements

Guifeng Zhang, L. J. Guo, Zhengtang Liu, Xiulin Zheng

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Optical Engineering, 33(4), (1994). https://doi.org/10.1117/12.163158

Abstract

In the present study, the rf plasma chemical vapor deposition technique is applied to directly deposit a diamond-like carbon (DLC) film onto a zinc sulfide (ZnS) substrate with excellent adhesion. Great attention is paid to the investigation of the correlation between the deposition process parameters and the structure and properties of DLC film, and of the optical spectrum characteristic of DLC films appropriate to protect IR window materials. The experimental results show that the refractive index, microhardness, and growth rate of DLC films increase with increasing dc bias voltage. The IR transmittance of the ZnS substrate with DLC film has been increased to some extent between 3 and 12 μm.

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Guifeng Zhang, L. J. Guo, Zhengtang Liu, and Xiulin Zheng "Application of diamond-like carbon film as protection and antireflection coatings of ZnS elements," Optical Engineering 33(4), (1 April 1994). https://doi.org/10.1117/12.163158

Published: 1 April 1994

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