Analysis of diffraction spectra for measuring surface form of spheric and rotationary symmetric aspheric components

Haiming Wang; Hanyu Mi

doi:10.1117/1.601482

1 September 1997 Analysis of diffraction spectra for measuring surface form of spheric and rotationary symmetric aspheric components

Haiming Wang, Hanyu Mi

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Optical Engineering, Vol. 36, Issue 9, (September 1997). https://doi.org/10.1117/1.601482

Measurements of aspheric surfaces by interferometry are possible but technically complicated. We present a simple laser-CCD camera setup based on the analysis of diffraction spectra for the surface form measurement. A slit is illuminated by a helium neon laser beam. A sample surface works as a mirror to direct the diffraction spectra of the slit to the CCD camera. The surface form of the sample redistributes the intensity of the diffraction spectra. This enables us to reconstruct the surface form from the measured diffraction spectra. This method has two particular features. First, no reference surface is necessary and therefore there is no special difficulty in measuring aspheric surfaces. Moreover, in comparison with the common focal plane light intensity measurement, we measure the light intensity distribution in the diffraction plane (the diffraction spectrum). It is not necessary to measure a very sharply dropping intensity distribution. In turn we do not need a detector with very broad dynamic range and very high special resolution.

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Haiming Wang and Hanyu Mi "Analysis of diffraction spectra for measuring surface form of spheric and rotationary symmetric aspheric components," Optical Engineering 36(9), (1 September 1997). https://doi.org/10.1117/1.601482

Published: 1 September 1997

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