Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry

Seung-Woo Kim; MinGu Kang; Geon-Soo Han

doi:10.1117/1.601546

1 November 1997 Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry

Seung-Woo Kim, MinGu Kang, Geon-Soo Han

Optical Engineering, Vol. 36, Issue 11, (November 1997). https://doi.org/10.1117/1.601546

One important issue in phase-shifting interferometry is to eliminate or compensate for phase shift errors. One solution is to adopt a least-squares technique in that actual reference values of phase shifts are readily identified directly from interferograms. This however, requires a relatively long computation time since a considerable amount of intensity information must be processed in an iterative way. To cope with this problem, we present an accelerated version of a least-squares phasemeasuring algorithm that can drastically reduce computation time.

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Seung-Woo Kim, MinGu Kang, and Geon-Soo Han "Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry," Optical Engineering 36(11), (1 November 1997). https://doi.org/10.1117/1.601546

Published: 1 November 1997

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