Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension

Lisong Yang; Li Liu; Guiying Wang; Zhizhan Xu

doi:10.1117/1.1367864

1 June 2001 Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension

Lisong Yang, Li Liu, Guiying Wang, Zhizhan Xu

Optical Engineering, Vol. 40, Issue 6, (June 2001). https://doi.org/10.1117/1.1367864

A noncontacting and noninterferometric depth discrimination technique, which is based on differential confocal microscopy, was used to measure the inverse piezoelectric extension of a piezoelectric ceramic lead zirconate titanate actuator. The response characteristics of the actuator with respect to the applied voltage, including displacement, linearity, and hysteresis, were obtained with nanometer measurement accuracy. Errors of the measurement have been analyzed.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Lisong Yang, Li Liu, Guiying Wang, and Zhizhan Xu "Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension," Optical Engineering 40(6), (1 June 2001). https://doi.org/10.1117/1.1367864

Published: 1 June 2001

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available